This book describes the basic principles of designing and modelling inductors, MIM capacitors and coplanar waveguides at frequencies of several tens of GHz. The author explains the design and modelling of key, passive elements, such as capacitors, inductors and transmission lines that enable high frequency MEMS operating at frequencies in the orders of tens of GHz.
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1 RF MEMS Process of Fraunhofer ISiT |
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1 | (6) |
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1.1 Handling the Problem of Inversion Channels |
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1 | (6) |
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1.1.1 Measurement Results |
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2 | (2) |
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1.1.2 Simulating with ADS Software |
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4 | (3) |
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7 | (12) |
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2.1 The Underlying Theory |
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7 | (4) |
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2.2 Accurate Formula for the Q-factor in Two-Port Configuration |
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11 | (1) |
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2.3 Labeling Method of the Inductor Structures |
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11 | (1) |
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12 | (3) |
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12 | (1) |
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2.4.2 Turn-to-Turn Spacing |
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13 | (1) |
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2.4.3 Conductor Metal Width |
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14 | (1) |
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14 | (1) |
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2.5 The Strategy for Inductor Library Design |
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15 | (2) |
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17 | (1) |
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18 | (1) |
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3 Modeling the Coplanar Line |
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19 | (16) |
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3.1 The Theoretical Approach |
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19 | (8) |
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26 | (1) |
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3.2 Simulations for Coplanar Lines |
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27 | (6) |
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3.3 Measurement Results and Conclusion |
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33 | (2) |
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35 | (16) |
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35 | (11) |
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37 | (2) |
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4.1.2 Calculation of CP1 and CP |
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39 | (2) |
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4.1.3 Series Inductance Calculation |
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41 | (1) |
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42 | (4) |
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4.2 DC-Block in the Design-Kit |
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46 | (5) |
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51 | (8) |
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5.1 The Building Blocks of the Design-Kit |
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52 | (2) |
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52 | (1) |
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53 | (1) |
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53 | (1) |
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54 | (5) |
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59 | (2) |
Appendix: Design-Kit Codes |
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61 | (20) |
References |
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81 | |
Naser Pour Aryan received the B.E. degree in electrical engineering from Ferdowsi University of Mashhad, Iran, in 2005 and the M.Sc. degree in communication technology from the University of Ulm, Germany, in 2008. In 2007, he was working in the Institute of Electron Devices and Circuits at the University of Ulm developing passive high frequency elements. He received his Ph.D. degree from the University of Ulm in December 2013. He has been working as a researcher on the retinal prosthesis project at the University of Ulm since January 2008. As part of his tasks, he has been developing on-chip inductors and capacitors for medical applications. Dr. Pour Aryans research interests include mainly modeling passive electrical structures, analog and mixed signal circuits, image processing, optics and electrochemistry.