Preface to the Second Edition |
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xv | |
Acknowledgments |
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xvii | |
About the Author |
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xix | |
Chapter 1 Ultrasonics: An Overview |
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1 | (12) |
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1 | (2) |
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1.2 Ultrasonics in Nature |
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3 | (3) |
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1.3 Historical Development |
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6 | (1) |
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7 | (1) |
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1.5 Low-Frequency Bulk Acoustic Wave Applications |
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8 | (1) |
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1.6 Surface Acoustic Waves |
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9 | (1) |
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1.7 Piezoelectric Materials |
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9 | (1) |
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1.8 High-Power Ultrasonics |
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10 | (1) |
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10 | (1) |
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11 | (1) |
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1.11 Underwater Acoustics and Seismology |
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11 | (1) |
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11 | (2) |
Chapter 2 Introduction to Vibrations and Waves |
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13 | (20) |
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13 | (11) |
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15 | (1) |
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2.1.2 Exponential Solutions: Phasors |
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15 | (1) |
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2.1.3 Damped Oscillations |
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16 | (1) |
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2.1.4 Forced Oscillations |
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17 | (2) |
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2.1.5 Phasors and Linear Superposition of Simple Harmonic Motion |
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19 | (2) |
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21 | (1) |
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2.1.7 Nonperiodic Waves: Fourier Integral |
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22 | (2) |
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24 | (6) |
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26 | (1) |
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2.2.2 Plane Waves in Three Dimensions |
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27 | (1) |
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2.2.3 Dispersion, Group Velocity, and Wave Packets |
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28 | (2) |
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30 | (1) |
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30 | (1) |
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31 | (2) |
Chapter 3 Bulk Waves in Fluids |
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33 | (18) |
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3.1 One-Dimensional Theory of Fluids |
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33 | (7) |
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35 | (3) |
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36 | (1) |
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37 | (1) |
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38 | (1) |
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39 | (1) |
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40 | (1) |
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3.2 Three-Dimensional Model |
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40 | (8) |
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3.2.1 Acoustic Poynting Vector |
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42 | (1) |
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43 | (31) |
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3.2.2.1 Decibel Scale of Attenuation |
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44 | (1) |
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3.2.2.2 Relaxation Time Formulation for Viscosity |
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44 | (1) |
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3.2.2.3 Attenuation Due to Viscosity |
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45 | (1) |
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3.2.2.4 Attenuation Due to Thermal Conduction |
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46 | (1) |
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3.2.2.5 Molecular Relaxation |
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47 | (1) |
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48 | (1) |
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48 | (1) |
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49 | (2) |
Chapter 4 Introduction to the Theory of Elasticity |
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51 | (14) |
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4.1 A Short Introduction to Tensors |
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51 | (1) |
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52 | (3) |
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55 | (1) |
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4.4 Thermodynamics of Deformation |
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56 | (1) |
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57 | (4) |
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4.6 Other Elastic Constants |
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61 | (2) |
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63 | (1) |
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64 | (1) |
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64 | (1) |
Chapter 5 Bulk Acoustic Waves in Solids |
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65 | (16) |
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65 | (2) |
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5.2 Wave Equation in Three Dimensions |
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67 | (3) |
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70 | (4) |
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74 | (4) |
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5.4.1 Viscoelastic Models |
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75 | (2) |
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77 | (1) |
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78 | (1) |
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78 | (1) |
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79 | (2) |
Chapter 6 Finite Beams: Radiation, Diffraction, and Scattering |
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81 | (20) |
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81 | (10) |
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81 | (3) |
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6.1.2 Radiation from a Circular Piston |
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84 | (7) |
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6.1.2.1 Fraunhofer (Far-Field) Region |
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84 | (5) |
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6.1.2.2 Fresnel (Near-Field) Approximation |
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89 | (2) |
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91 | (3) |
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92 | (1) |
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93 | (1) |
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6.3 Focused Acoustic Waves |
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94 | (2) |
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96 | (1) |
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97 | (2) |
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99 | (1) |
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99 | (1) |
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100 | (1) |
Chapter 7 Reflection and Transmission of Ultrasonic Waves at Interfaces |
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101 | (24) |
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101 | (2) |
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7.2 Reflection and Transmission at Normal Incidence |
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103 | (5) |
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105 | (2) |
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7.2.2 Reflection from a Layer |
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107 | (1) |
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7.3 Oblique Incidence: Fluid-Fluid Interface |
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108 | (3) |
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7.3.1 Symmetry Considerations |
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111 | (1) |
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7.4 Fluid-Solid Interface |
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111 | (9) |
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7.5 Solid-Solid Interface |
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120 | (2) |
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7.5.1 Solid-Solid Interface: SH Modes |
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120 | (1) |
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7.5.2 Reflection at a Free Solid Boundary |
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121 | (1) |
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122 | (1) |
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122 | (1) |
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123 | (2) |
Chapter 8 Rayleigh Waves |
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125 | (16) |
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125 | (1) |
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8.2 Rayleigh Wave Propagation |
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125 | (5) |
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130 | (8) |
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134 | (3) |
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8.3.2 Lateral Waves: Summary of Leaky Rayleigh Waves |
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137 | (1) |
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8.3.3 Stoneley Waves at a Liquid-Solid Interface |
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137 | (1) |
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138 | (1) |
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139 | (1) |
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139 | (2) |
Chapter 9 Lamb Waves |
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141 | (10) |
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9.1 Potential Method for Lamb Waves |
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141 | (6) |
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9.2 Fluid-Loading Effects |
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147 | (3) |
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9.2.1 Fluid-Loaded Plate: One Side |
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147 | (1) |
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9.2.2 Fluid-Loaded Plate: Same Fluid Both Sides |
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148 | (1) |
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9.2.3 Fluid-Loaded Plate: Different Fluids |
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148 | (1) |
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9.2.4 Fluid-Loaded Solid Cylinder |
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149 | (1) |
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149 | (1) |
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150 | (1) |
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150 | (1) |
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150 | (1) |
Chapter 10 Acoustic Waveguides |
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151 | (24) |
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10.1 Introduction: Partial Wave Analysis |
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151 | (1) |
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10.2 Waveguide Equation: SH Modes |
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151 | (4) |
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155 | (1) |
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156 | (1) |
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157 | (10) |
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158 | (3) |
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10.5.2 Generalized Lamb Waves |
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161 | (4) |
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165 | (2) |
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10.6 Multilayer Structures |
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167 | (1) |
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10.7 Free Isotropic Cylinder |
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168 | (1) |
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10.8 Waveguide Configurations |
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169 | (2) |
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10.8.1 Overlay Waveguides |
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170 | (1) |
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170 | (1) |
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10.8.1.2 Shorting Strip Waveguide |
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170 | (1) |
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10.8.2 Topographic Waveguides |
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171 | (1) |
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10.8.3 Circular Fiber Waveguides |
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171 | (1) |
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171 | (1) |
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172 | (1) |
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172 | (3) |
Chapter 11 Crystal Acoustics |
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175 | (12) |
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175 | (2) |
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176 | (1) |
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11.2 Group Velocity and Characteristic Surfaces |
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177 | (3) |
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180 | (5) |
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180 | (1) |
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11.3.2 Piezoelectric Constitutive Relations |
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181 | (3) |
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11.3.3 Piezoelectric Coupling Factor |
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184 | (1) |
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185 | (1) |
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186 | (1) |
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186 | (1) |
Chapter 12 Cavitation and Sonoluminescence |
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187 | (26) |
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187 | (6) |
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12.1.1 Quasistatic Bubble Description |
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187 | (1) |
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188 | (3) |
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190 | (1) |
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12.1.2.2 Rectified Diffusion |
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190 | (1) |
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191 | (1) |
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12.1.4 Acoustic Response of Bubbly Liquids |
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191 | (2) |
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12.2 Multibubble Sonoluminescence |
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193 | (3) |
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12.2.1 Summary of Experimental Results |
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194 | (2) |
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196 | (14) |
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196 | (1) |
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12.3.2 Experimental Setup |
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197 | (3) |
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200 | (2) |
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12.3.3.1 Bubble Stability |
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201 | (1) |
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12.3.4 Key Experimental Results in Water |
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|
202 | (4) |
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202 | (1) |
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12.3.4.2 Direct Test of the DH Hypothesis |
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203 | (1) |
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12.3.4.3 SBSL Pulse Width |
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204 | (1) |
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204 | (1) |
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12.3.4.5 Ambient Pressure Variation |
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205 | (1) |
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12.3.5 Successful Models in Water |
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206 | (1) |
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12.3.6 SBSL in Other Liquids |
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206 | (3) |
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12.3.7 Similarities between MBSL and SBSL |
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209 | (1) |
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210 | (1) |
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210 | (1) |
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211 | (2) |
Chapter 13 Bulk Acoustic Wave Transducers, Delay Lines, and Oscillators |
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213 | (20) |
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13.1 Bulk Acoustic Wave Transducers |
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213 | (6) |
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13.1.1 Unloaded Transducer |
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216 | (2) |
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218 | (1) |
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13.2 Bulk Acoustic Wave Delay Lines |
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219 | (5) |
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219 | (2) |
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13.2.2 Buffer Rod Materials |
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221 | (1) |
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13.2.3 Acoustic Losses in Buffer Rods |
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222 | (1) |
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222 | (1) |
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222 | (1) |
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13.2.4 BAW Buffer Rod Applications |
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223 | (1) |
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223 | (1) |
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13.3 Quartz Crystal Resonators |
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224 | (4) |
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224 | (2) |
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226 | (1) |
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13.3.3 Resonator Structure and Packaging |
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226 | (1) |
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13.3.4 Recent Developments |
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227 | (1) |
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228 | (1) |
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229 | (1) |
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230 | (1) |
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230 | (3) |
Chapter 14 Surface Acoustic Wave Transducers, Analog Signal Processing, and Mobile Applications |
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233 | (26) |
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233 | (1) |
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234 | (6) |
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14.2.1 Interdigital Transducer |
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234 | (3) |
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235 | (2) |
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14.2.2 Delay Line Configuration |
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237 | (1) |
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238 | (1) |
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14.2.4 Multistrip Coupler |
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239 | (1) |
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14.3 Materials and Technology |
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240 | (1) |
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240 | (1) |
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14.3.2 Temperature Coefficient of Delay |
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240 | (1) |
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241 | (1) |
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241 | (1) |
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241 | (9) |
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241 | (1) |
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242 | (3) |
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14.4.3 Resonators and Resonator Filters |
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245 | (2) |
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14.4.3.1 One Port Resonator |
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245 | (1) |
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14.4.3.2 Two Port Resonator |
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246 | (1) |
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247 | (1) |
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14.4.5 Time-Coded Dispersive Elements |
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248 | (2) |
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249 | (1) |
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14.4.5.2 Reflective Array Compression |
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249 | (1) |
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249 | (1) |
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250 | (3) |
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14.5.1 Historical Development |
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250 | (1) |
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14.5.2 SAW Filters in Mobile Devices |
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251 | (8) |
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251 | (1) |
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252 | (1) |
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14.6 Saw Wireless Communication to Coded Devices |
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253 | (2) |
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255 | (1) |
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256 | (1) |
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256 | (3) |
Chapter 15 Microacoustics: RF MEMS, FBAR, and CMUT |
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259 | (24) |
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259 | (1) |
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15.2 Overview of MEMS Technology |
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259 | (6) |
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15.2.1 Microelectronic Materials |
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260 | (1) |
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15.2.2 Patterning and Etching Techniques |
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261 | (1) |
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262 | (1) |
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263 | (1) |
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15.2.5 Micromachining and MEMS |
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263 | (2) |
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265 | (3) |
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15.3.1 RF MEMS Resonators |
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265 | (1) |
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15.3.2 MEMS as Circuit Elements |
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266 | (1) |
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15.3.3 Chip Scale Atomic Clocks |
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267 | (1) |
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15.3.4 Practical Issues and Perspectives |
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268 | (1) |
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268 | (8) |
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15.4.1 Historical Background |
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269 | (2) |
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15.4.2 FBAR and SMR Technology |
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271 | (1) |
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15.4.3 FBAR and SMR Devices |
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272 | (2) |
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15.4.4 Comparison of FBAR and SAW for RF Applications |
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274 | (1) |
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15.4.5 Conclusions and Perspectives |
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275 | (1) |
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15.5 CMUT Capacitive Transducers |
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276 | (4) |
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15.5.1 CMUT Fabrication Technology |
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277 | (2) |
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15.5.2 Performance Enhancement of CMUTs |
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279 | (1) |
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280 | (1) |
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280 | (1) |
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281 | (2) |
Chapter 16 Acoustic Sensors |
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283 | (46) |
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16.1 Thickness-Shear Mode Resonators |
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283 | (7) |
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16.1.1 TSM Resonator in Liquid |
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287 | (1) |
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16.1.2 TSM Resonator with a Viscoelastic Film |
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288 | (1) |
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16.1.3 Lateral Field Excited Sensors |
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289 | (1) |
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16.1.4 Electrodeless QCM Sensors |
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290 | (1) |
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290 | (6) |
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291 | (1) |
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16.2.2 Acoustoelectric Interaction |
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292 | (3) |
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16.2.3 Elastic and Viscoelastic Films on SAW Substrates |
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295 | (1) |
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16.2.4 Wireless SAW Sensors |
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295 | (1) |
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296 | (4) |
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16.3.1 Acoustic Plate Mode Sensors |
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296 | (2) |
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298 | (1) |
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299 | (1) |
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16.3.4 Surface Transverse Wave Sensors |
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299 | (1) |
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16.4 Flexural Plate Wave Sensors |
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|
300 | (3) |
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303 | (1) |
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303 | (1) |
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16.7 Thin-Rod Acoustic Sensors |
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304 | (3) |
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16.8 Gravimetric Sensitivity Analysis and Comparison |
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|
307 | (4) |
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16.9 Physical Sensing of Liquids |
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311 | (5) |
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311 | (1) |
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312 | (1) |
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16.9.3 Temperature Sensing |
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313 | (1) |
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314 | (1) |
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315 | (1) |
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16.10 Chemical Gas Sensors |
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316 | (4) |
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316 | (1) |
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16.10.2 Chemical Interfaces for Sensing |
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316 | (1) |
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317 | (1) |
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16.10.4 Gas Chromatography with Acoustic Sensor Detection |
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318 | (1) |
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16.10.5 Artificial Olfactory Mucosa |
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318 | (2) |
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16.11 Taste Sensing: Electronic Tongue |
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320 | (1) |
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321 | (2) |
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16.13 Perspectives in Acoustic Sensors |
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323 | (1) |
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323 | (1) |
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324 | (1) |
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324 | (5) |
Chapter 17 Focused Beam Acoustic Microscopy |
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329 | (26) |
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329 | (4) |
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333 | (5) |
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17.3 Acoustic Lens Design |
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338 | (3) |
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17.4 Contrast Mechanisms and Quantitative Measurements |
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341 | (5) |
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341 | (2) |
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17.4.2 Reflectance Function from Fourier Inversion |
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343 | (1) |
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343 | (2) |
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17.4.4 Subsurface (Interior) Imaging |
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345 | (1) |
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17.5 Applications of Acoustic Microscopy |
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346 | (5) |
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17.5.1 Biological Samples |
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346 | (2) |
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17.5.2 Films and Substrates |
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348 | (1) |
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349 | (1) |
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350 | (1) |
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351 | (1) |
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352 | (1) |
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352 | (3) |
Chapter 18 Near-Field Acoustic Microscopy |
|
355 | (32) |
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355 | (1) |
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18.2 Scanning Tunneling Microscope |
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356 | (1) |
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18.3 Atomic Force Microscope |
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357 | (2) |
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359 | (2) |
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18.4.1 Physical Model for Dynamic Contact Mechanics |
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359 | (2) |
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18.5 Contact Resonance Force Microscopy |
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|
361 | (10) |
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18.5.1 Atomic Force Acoustic Microscopy |
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|
362 | (8) |
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18.5.1.1 Flexural Vibrations of Cantilevers with the End Unconstrained |
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364 | (1) |
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18.5.1.2 Flexural Vibrations of Cantilevers with the Tip in Contact |
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365 | (2) |
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18.5.1.3 Physical Model for Tip-Surface Contact |
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367 | (1) |
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368 | (1) |
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368 | (2) |
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18.5.2 Ultrasonic Atomic Force Microscopy |
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370 | (1) |
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18.5.3 Lateral and TR Mode Microscopy |
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370 | (1) |
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18.5.3.1 Ultrasonic Friction Force Microscopy |
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370 | (1) |
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18.5.3.2 TR Mode or TR-AFM |
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371 | (1) |
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18.6 Mechanical Diode Effect Microscopy |
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371 | (5) |
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18.6.1 Ultrasonic Force Microscopy |
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|
371 | (3) |
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18.6.2 Mechanical Diode Ultrasonic Friction Force Microscopy |
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|
374 | (1) |
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18.6.3 Heterodyne Force Microscopy |
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|
374 | (1) |
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18.6.4 Scanning Near-Field Ultrasound Holography |
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374 | (2) |
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18.7 Acoustic Wave Probe Microscopy |
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|
376 | (4) |
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18.8 Other Probe Microscopies |
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|
380 | (2) |
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18.8.1 Piezoresponse Force Microscopy |
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|
380 | (1) |
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18.8.2 Optical Heterodyne Force Microscopy |
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|
381 | (1) |
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|
382 | (1) |
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382 | (1) |
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|
383 | (1) |
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|
384 | (3) |
Chapter 19 Nondestructive Evaluation of Materials |
|
387 | (28) |
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|
387 | (3) |
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390 | (4) |
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19.2.1 Principles of Rayleigh Wave NDE |
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|
391 | (1) |
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19.2.2 Generation of Rayleigh Waves for NDE |
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|
392 | (1) |
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19.2.3 Critical Angle Reflectivity |
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|
392 | (2) |
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|
394 | (2) |
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19.3.1 Leaky Lamb Waves: Dispersion Curves |
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|
394 | (1) |
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19.3.2 NDE Using Leaky Lamb Waves |
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|
395 | (1) |
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396 | (4) |
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19.4.1 Inversion Procedures |
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|
396 | (2) |
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19.4.2 Modal Frequency Spacing Method |
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|
398 | (2) |
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|
400 | (2) |
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|
402 | (5) |
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19.6.1 Mode-Cutoff-Based Approaches |
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|
404 | (3) |
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|
407 | (1) |
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19.8 Structural Health Monitoring |
|
|
408 | (1) |
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19.9 Time Reversal Mirrors |
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|
409 | (2) |
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|
411 | (1) |
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|
412 | (1) |
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|
412 | (3) |
Chapter 20 Non/Loosely Contacting NDE Techniques |
|
415 | (30) |
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|
415 | (12) |
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20.1.1 Laser Generation of Ultrasound |
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|
416 | (1) |
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20.1.2 Laser Detection of Ultrasound |
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|
417 | (2) |
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20.1.2.1 Homodyne Reference Beam Interferometry |
|
|
417 | (1) |
|
20.1.2.2 Heterodyne Reference Beam Interferometry |
|
|
418 | (1) |
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20.1.2.3 Self-Referential Interferometry |
|
|
418 | (1) |
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20.1.2.4 Fiber Optic Ultrasound Sensors |
|
|
419 | (1) |
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20.1.2.5 Sensitivity Considerations |
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|
419 | (1) |
|
|
419 | (5) |
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20.1.3.1 Microelectronic Device Characterization |
|
|
420 | (4) |
|
20.1.4 Picosecond Laser Ultrasonics |
|
|
424 | (3) |
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20.1.4.1 Dispersion or Long-Wavelength Phonons |
|
|
425 | (1) |
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20.1.4.2 Experimental Setup and Data Analysis |
|
|
426 | (1) |
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20.1.4.3 FBAR Characterization |
|
|
426 | (1) |
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20.2 Electromagnetic Acoustic Transducers |
|
|
427 | (5) |
|
|
428 | (2) |
|
|
430 | (1) |
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20.2.3 Configurations and Operation |
|
|
430 | (1) |
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|
431 | (1) |
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20.3 Air-Coupled Transducers |
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|
432 | (4) |
|
20.3.1 Piezoelectric Transducers |
|
|
433 | (1) |
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20.3.2 Capacitive and Micromachined Transducers |
|
|
434 | (1) |
|
20.3.3 Comparison of Transducer Sensitivities |
|
|
435 | (1) |
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20.4 Resonant Ultrasound Spectroscopy |
|
|
436 | (5) |
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20.4.1 Theoretical Background and Data Analysis |
|
|
437 | (1) |
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20.4.2 Experimental Methods |
|
|
438 | (1) |
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20.4.3 Special Techniques |
|
|
438 | (1) |
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20.4.4 Resonant Ultrasound Microscopy |
|
|
439 | (2) |
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|
441 | (1) |
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|
441 | (1) |
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|
442 | (3) |
Appendix A: Bessel Functions |
|
445 | (2) |
Appendix B: Acoustic Properties of Materials |
|
447 | (22) |
Appendix C: Complementary Laboratory Experiments |
|
469 | (6) |
Index |
|
475 | |