About the Authors |
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xiii | |
Preface |
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xix | |
Acknowledgments |
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xxiii | |
Glossary of Terms |
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xxv | |
1 Introduction and Historical Perspective |
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1 | (30) |
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1 | (1) |
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1.2 Discovery of X-Rays, Radiation, and Subatomic Particles |
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2 | (6) |
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8 | (1) |
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9 | (6) |
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1.5 Semiconductors - Revolution, Evolution, and Scaling |
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15 | (5) |
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1.6 Beginning of Ionizing Radiation Effects in Semiconductors |
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20 | (2) |
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1.7 Beginning of Single-Event Effects in Semiconductors |
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22 | (4) |
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1.8 Summary and Closing Comments |
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26 | (1) |
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27 | (4) |
2 Radiation Environments |
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31 | (54) |
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31 | (1) |
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2.2 X-Rays, Gamma Rays, and the Atom |
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31 | (24) |
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31 | (3) |
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34 | (2) |
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36 | (1) |
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2.2.4 Nuclear Structure and Binding Energy |
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36 | (14) |
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2.2.4.1 Models of the Nucleus |
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38 | (12) |
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2.2.5 Alpha and Beta Decay |
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50 | (3) |
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51 | (1) |
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52 | (1) |
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2.2.6 Gamma-Ray Emission or Gamma Decay |
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53 | (1) |
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2.2.7 Other Types of Nuclear Radiation |
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54 | (1) |
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2.3 Natural Radioactivity |
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55 | (3) |
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55 | (1) |
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56 | (2) |
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2.4 The Space Environment |
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58 | (13) |
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59 | (3) |
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62 | (4) |
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66 | (3) |
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2.4.4 Atmospheric Neutrons |
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69 | (2) |
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2.5 The Nuclear Reactor Environment |
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71 | (4) |
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2.6 The Weapons Environment |
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75 | (3) |
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2.7 The Environment in High-Energy Physics Facilities |
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78 | (2) |
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2.8 Summary and Closing Comments |
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80 | (1) |
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81 | (4) |
3 Radiation Effects in Semiconductor Materials |
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85 | (58) |
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85 | (1) |
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86 | (25) |
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3.2.1 Heavy Charged Particles |
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86 | (7) |
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86 | (1) |
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3.2.1.2 Electronic Stopping |
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87 | (5) |
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92 | (1) |
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93 | (8) |
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3.2.2.1 Electromagnetic Radiation |
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93 | (3) |
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96 | (5) |
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101 | (5) |
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3.2.3.1 Neutron Cross Section |
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102 | (1) |
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3.2.3.2 Interactions with Matter |
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103 | (3) |
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3.2.4 Photons (X-Rays, Gamma Rays) |
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106 | (5) |
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3.2.4.1 Photoelectric Effect |
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107 | (1) |
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3.2.4.2 Compton Scattering |
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108 | (1) |
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109 | (1) |
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3.2.4.4 Photonuclear Reactions |
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110 | (1) |
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3.3 Charge Trapping in Silicon Dioxide |
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111 | (20) |
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3.3.1 Charge Generation/Recombination |
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111 | (7) |
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3.3.1.1 Geminate and Columnar Models |
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112 | (1) |
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3.3.1.2 Geminate Recombination |
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113 | (2) |
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3.3.1.3 Columnar Recombination |
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115 | (2) |
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3.3.1.4 Numerical Methods |
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117 | (1) |
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3.3.2 Hole Trapping and Transport |
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118 | (6) |
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120 | (2) |
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3.3.2.2 Continuous-Time Random-Walk (CTRW) |
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122 | (2) |
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3.3.3 The Silicon/Silicon Dioxide Interface |
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124 | (19) |
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125 | (2) |
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127 | (1) |
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128 | (2) |
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130 | (1) |
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131 | (2) |
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3.5 Summary and Closing Comments |
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133 | (2) |
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135 | (8) |
4 Radiation-Induced Single Events |
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143 | (30) |
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4.1 Introduction - Single-Events Effects (SEE) |
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143 | (5) |
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4.1.1 Single-Event Upsets (SEU) |
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143 | (1) |
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4.1.2 Multiple-Bit Upset (MBU) |
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143 | (1) |
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4.1.3 Single-Event Transients (SET) |
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144 | (1) |
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4.1.4 Single-Event Functional Interrupts (SEFIs) |
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144 | (1) |
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4.1.5 Single-Event Disturb (SED) |
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145 | (1) |
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4.1.6 Single-Event Snapback (SESB) |
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146 | (1) |
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4.1.7 Single-Event Latchup (SEL) |
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146 | (1) |
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4.1.8 Single-Event Burnout (SEB) |
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146 | (1) |
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4.1.9 Single-Event Gate Rupture (SEGR) |
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147 | (1) |
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4.1.10 Single-Event Hard Errors (SHE) |
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147 | (1) |
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4.2 Single-Event Upset (SEU) |
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148 | (1) |
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148 | (1) |
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148 | (1) |
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4.2.3 SEU in Bipolar Memory |
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148 | (1) |
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149 | (1) |
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4.2.5 SEU in Future Technology - FINFETs |
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149 | (1) |
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4.3 SEU - Particle Sources |
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149 | (5) |
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4.3.1 SEU Source - Alpha Particles |
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150 | (2) |
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4.3.2 SEU Source - Pions and Muons |
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152 | (1) |
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153 | (1) |
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4.3.4 SEU Source - Protons |
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153 | (1) |
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154 | (1) |
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4.4 Single-Event Gate Rupture (SEGR) |
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154 | (4) |
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155 | (1) |
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4.4.2 SEGR Source - Ion Track |
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155 | (1) |
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4.4.3 SEGR Source - Failure Mechanism |
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156 | (1) |
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4.4.4 SEGR - Modeling and Simulation |
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156 | (1) |
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4.4.5 Power Transistors and SEGR |
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156 | (2) |
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4.4.5.1 Lateral Power Transistors SEGR |
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156 | (1) |
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4.4.5.2 Vertical MOS (VMOS) SEGR |
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157 | (1) |
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4.4.5.3 Advanced Technologies - Planar MOSFET SEGR |
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157 | (1) |
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4.5 Single-Event Transients (SETS) |
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158 | (1) |
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158 | (1) |
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158 | (1) |
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4.5.3 SET Source Failure Mechanisms |
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159 | (1) |
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4.5.4 SET in Integrated Circuits |
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159 | (1) |
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4.5.4.1 Digital Circuitry |
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159 | (1) |
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4.5.4.2 Continuous Time Analog Circuitry |
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159 | (1) |
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4.5.5 Prediction and Hardening |
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159 | (1) |
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4.6 Single-Event Latchup (SEL) |
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159 | (6) |
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160 | (1) |
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160 | (1) |
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161 | (1) |
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4.6.4 SEL Maximum Charge Collection Evaluation in a Parallelepiped Region |
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162 | (2) |
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4.6.5 A SEL Design Practice |
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164 | (1) |
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4.6.6 SEL Semiconductor Device Simulation |
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165 | (1) |
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4.7 Summary and Closing Comments |
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165 | (1) |
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166 | (7) |
5 Radiation Testing |
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173 | (36) |
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173 | (2) |
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5.1.1 Radiation Units and Measurements |
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173 | (2) |
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5.2 Radiation Testing and Sources |
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175 | (26) |
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5.2.1 Total Ionizing Dose (TID) Testing |
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176 | (3) |
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5.2.2 Total Ionizing Dose (TID) Sources |
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179 | (3) |
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5.2.3 Single-Event Effects (SEE) Testing |
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182 | (5) |
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5.2.4 Single-Event Effects (SEE) Sources and Facilities |
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187 | (5) |
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192 | (1) |
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193 | (2) |
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195 | (1) |
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196 | (1) |
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5.2.9 Transient Gamma Testing |
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197 | (1) |
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5.2.10 Transient Gamma Sources |
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198 | (3) |
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5.3 Summary and Closing Comments |
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201 | (3) |
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204 | (5) |
6 Device Modeling and Simulation Techniques |
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209 | (40) |
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209 | (1) |
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210 | (5) |
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211 | (1) |
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212 | (1) |
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6.2.3 Composite Models and Inline Subcircuits |
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212 | (2) |
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6.2.4 Analysis and Statistics Programs |
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214 | (1) |
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6.3 Radiation Effects on Semiconductor Devices |
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215 | (21) |
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6.3.1 MOS Capacitors and Transistors |
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215 | (9) |
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216 | (3) |
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219 | (5) |
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6.3.2 Diodes and Bipolar Transistors |
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224 | (6) |
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224 | (1) |
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6.3.2.2 Bipolar Transistors |
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225 | (5) |
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230 | (2) |
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6.3.3.1 DMOS Composite Models |
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231 | (1) |
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6.3.3.2 Operating Voltage |
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232 | (1) |
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232 | (3) |
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6.3.4.1 Junction Field Effect Transistors (JFETs) |
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232 | (2) |
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234 | (1) |
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235 | (1) |
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6.3.5 Some Modeling Challenges |
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235 | (1) |
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236 | (6) |
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236 | (3) |
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239 | (3) |
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6.5 Summary and Closing Comments |
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242 | (2) |
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244 | (5) |
7 Radiation Semiconductor Process and Layout Solutions |
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249 | (44) |
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249 | (1) |
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7.2 Substrate Hardened Technologies |
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249 | (4) |
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7.2.1 Silicon-on-Insulator (SOI) Technologies |
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250 | (1) |
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7.2.1.1 Separation by Implanted Oxygen (SIMOX) |
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250 | (1) |
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7.2.1.2 Silicon-Bonded (SIBOND) Technology |
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250 | (1) |
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7.2.2 Silicon on Sapphire (SOS) |
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251 | (1) |
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7.2.3 Silicon on Diamond (SOD) |
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252 | (1) |
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7.2.4 Silicon on Nothing (SON) |
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252 | (1) |
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7.3 Oxide Hardening Technologies |
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253 | (2) |
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7.3.1 Oxide Growth and Fluorination of Oxide |
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253 | (1) |
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7.3.2 MOSFET Gate Oxide Hardening |
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253 | (1) |
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7.3.3 Recessed Oxide (ROX) Hardening |
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254 | (1) |
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7.3.4 LOCOS Isolation Hardening |
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254 | (1) |
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7.3.5 Shallow Trench Isolation (STI) Hardening |
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254 | (1) |
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7.4 CMOS Latchup Process Solutions |
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255 | (1) |
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7.5 CMOS Substrates - High-Resistance Substrates |
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255 | (5) |
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7.5.1 50 S2-cm Substrate Resistance |
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259 | (1) |
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260 | (4) |
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7.6.1 Single Well - Diffused N-Well |
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261 | (1) |
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7.6.2 Single Well - Retrograde N-Well |
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261 | (1) |
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7.6.3 Dual-Well Technology |
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262 | (2) |
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7.6.3.1 P-well and P++ Substrate |
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262 | (1) |
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7.6.3.2 P-Well and P+ Connecting Implant |
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263 | (1) |
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7.7 Triple-Well Technology |
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264 | (2) |
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7.7.1 Triple Well - Full Separation of Wells |
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264 | (1) |
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7.7.2 Triple Well - Merged Triple Well |
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265 | (1) |
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7.7.3 Triple Well - Merged Triple Well with Blanket Implant |
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266 | (1) |
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266 | (2) |
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7.8.1 Epitaxial Grown Sub-Collector |
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266 | (1) |
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7.8.2 Implanted Sub-Collector |
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267 | (1) |
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7.8.3 Sub-Collector - NPN and PNP Bipolar Current Gain |
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267 | (1) |
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7.8.4 Sub-Collector - Beta Product βPNPβNPN |
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267 | (1) |
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7.9 Heavily Doped Buried Layers (HDBL) |
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268 | (2) |
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7.9.1 Buried Implanted Layer for Lateral Isolation (BILLI) Process |
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268 | (1) |
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7.9.2 Continuous HDBL Implant |
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268 | (2) |
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7.9.3 Buried Guard Ring (BGR) |
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270 | (1) |
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270 | (7) |
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270 | (1) |
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7.10.2 Shallow Trench Isolation (STI) |
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270 | (1) |
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7.10.3 Dual Depth Isolation |
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271 | (1) |
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7.10.4 Trench Isolation (TI) |
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272 | (5) |
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7.10.4.1 Trench Isolation (TI) and Sub-Collector |
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274 | (3) |
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277 | (7) |
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7.11.1 Deep Trench (DT) within PNPN Structure |
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279 | (2) |
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7.11.2 Deep Trench Structure and Sub-Collector |
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281 | (2) |
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7.11.3 Deep Trench Structure and Merged Triple Well |
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283 | (1) |
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284 | (2) |
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7.12.1 Polysilicon Bound Structures |
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284 | (1) |
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7.12.2 Parasitic Isolation Device (PID) |
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284 | (2) |
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7.13 Summary and Closing Comments |
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286 | (1) |
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287 | (6) |
8 Single-Event Upset Circuit Solutions |
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293 | (12) |
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293 | (1) |
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8.2 CMOS DRAM SEU Circuit Solutions |
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293 | (3) |
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8.2.1 CMOS DRAM Redundancy |
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294 | (1) |
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8.2.2 CMOS DRAM with SRAM Error Correction |
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294 | (2) |
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8.3 CMOS SRAM SEU Circuit Solution |
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296 | (3) |
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8.3.1 CMOS SRAM Four-Device Cell |
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296 | (1) |
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8.3.2 CMOS SRAM Six-Device Cell |
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297 | (1) |
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8.3.3 CMOS SRAM 12-Device Cell |
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298 | (1) |
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299 | (2) |
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8.4.1 Bipolar SRAM Cell with Resistor Loads |
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300 | (1) |
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8.4.2 Bipolar SRAM Cell with Resistor Loads and Schottky Clamps |
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300 | (1) |
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8.4.3 Bipolar SRAM Cell with PNP Transistors |
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301 | (1) |
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8.5 Bipolar SRAM Circuit Solutions |
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301 | (1) |
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8.6 SEU in CMOS Logic Circuitry |
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302 | (1) |
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8.7 Summary and Closing Comments |
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302 | (1) |
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303 | (2) |
9 Latchup Circuit Solutions |
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305 | (28) |
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305 | (1) |
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9.2 Power Supply Concepts |
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305 | (6) |
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9.2.1 Power Supply Current Limit - Series Resistor |
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305 | (1) |
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9.2.2 Power Supply Current Limit - Current Source |
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306 | (1) |
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9.2.3 Power Supply Solutions - Voltage Regulator |
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307 | (1) |
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9.2.4 Latchup Circuit Solutions - Power Supply Decoupling |
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308 | (3) |
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9.3 Overshoot and Undershoot Clamp Networks |
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311 | (7) |
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9.3.1 Passive Clamp Networks |
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312 | (1) |
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9.3.2 Active Clamp Networks |
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313 | (3) |
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9.3.3 Dynamic Threshold Triple Well Passive and Active Clamp Networks |
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316 | (2) |
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9.4 Passive and Active Guard Rings |
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318 | (8) |
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9.4.1 Passive Guard Ring Circuits and Structures |
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318 | (1) |
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9.4.2 Active Guard Ring Circuits and Structures |
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319 | (7) |
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9.5 Triple-Well Noise and Latchup Suppression Structures |
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326 | (1) |
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9.6 System-Level Latchup Issues |
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326 | (1) |
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9.7 Summary and Closing Comments |
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327 | (2) |
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329 | (4) |
10 Emerging Effects and Future Technology |
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333 | (14) |
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333 | (1) |
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10.2 Radiation Effects in Advanced Technologies |
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333 | (3) |
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10.2.1 Moore's Law, Scaling, and Radiation Effects |
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334 | (1) |
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10.2.2 Technology Lifetime and Reliability |
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334 | (1) |
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335 | (1) |
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10.2.2.2 Throwaway Mentality |
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335 | (1) |
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10.2.2.3 New Space Entrants |
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335 | (1) |
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10.2.3 Terrestrial Issues |
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335 | (1) |
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10.2.4 Space Mission Issues |
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335 | (1) |
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335 | (1) |
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336 | (1) |
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10.2.7 Internet of Things (IoT) |
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336 | (1) |
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336 | (1) |
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10.3 Radiation Effects in Semiconductor Nanostructures |
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336 | (4) |
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10.3.1 Planar MOSFETs in Sub-25 nm |
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337 | (1) |
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338 | (1) |
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339 | (1) |
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340 | (1) |
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10.4 Radiation Effects and Advanced Packaging |
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340 | (2) |
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10.4.1 Radiation Effects and 2.5-D Circuits and Technology |
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341 | (1) |
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10.4.2 Radiation Effects and 3-D Circuits and Technology |
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341 | (1) |
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10.4.3 More than Moore and 3-D Integration |
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342 | (1) |
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10.5 Ruggedized Capability |
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342 | (1) |
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10.5.1 Ruggedized Capability for Radiation |
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343 | (1) |
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10.5.2 Ruggedized Capability for High Temperature |
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343 | (1) |
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343 | (1) |
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344 | (1) |
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10.8 Summary and Closing Comments |
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344 | (1) |
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345 | (2) |
Index |
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347 | |