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E-grāmata: MicroMechatronics, Second Edition

Kenji Uchino

Formāts: 584 pages
Izdošanas datums: 19-Jul-2019
Izdevniecība: CRC Press
Valoda: eng
ISBN-13: 9780429535925

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Formāts: 584 pages
Izdošanas datums: 19-Jul-2019
Izdevniecība: CRC Press
Valoda: eng
ISBN-13: 9780429535925

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After Uchino’s introduction of a new terminology, ‘Micromechatronics’ in 1979 for describing the application area of ‘piezoelectric actuators’, the rapid advances in semiconductor chip technology have led to a new terminology MEMS
(micro-electro-mechanical-system) or even NEMS (nano-electro-mechanicalsystem) to describe mainly thin film sensor/actuator devices, a narrower area of micromechatronics coverage. New technologies, product developments and commercialization are providing the necessity of this major revision. In particular, the progresses in high power transducers, loss mechanisms in smart materials, energy harvesting and computer simulations are significant.

New technologies, product developments and commercialization are providing
the updating requirement for the book contents, in parallel to the deletion of old
contents.
Various educational/instructional example problems have been accumulated, which were integrated in the new edition in order to facilitate the self-learning for the students, and the quiz/problem creation for the
instructors.
Heavily revised topics from the previous edition include: high power transducers, loss mechanisms in smart
materials, energy harvesting and computer simulations
New technologies, product developments and commercialization helped shape the updated contents of this book where all chapters have been updated and revised.
This textbook is intended for graduate students and industrial engineers studying or
working in the fields of electronic materials, control system engineering, optical
communications, precision machinery, and robotics. The text is designed primarily
for a graduate course with the equivalent of thirty 75-minute lectures; however, it is
also suitable for self-study by individuals wishing to extend their knowledge in the
field.

Uchino presents in this updated Second Edition, a theoretical description of solid-state actuators, an overview of practical materials, device designs, drive/control techniques, and typical applications, as we consider current and future trends in the field of micromechatronics.

Second Edition Preface

First Edition Preface

xvii

Author

xix

List of Symbols

xxi

Suggested Teaching Schedule

xxiii

Prerequisite Knowledge Check

xxv

Answers

xxvii

Chapter 1 Current Trends for Actuators and Micromechatronics

(36)

1.1 The Need for New Actuators

(3)

1.2 Conventional Methods for Positioning

(2)

1.2.1 Oil Pressure Type Displacement Reduction Mechanism

(1)

1.2.2 Pure Mechanical Displacement Reduction Mechanism

(1)

1.3 An Overview of Solid-State Actuators

(25)

1.3.1 Microelectromagnetic Motors

(1)

1.3.2 Micro-Electro-Mechanical-Systems

(2)

1.3.3 Artificial Muscle

(3)

1.3.4 Smart Actuators

(4)

1.3.5 Shape Memory Alloys

(3)

1.3.6 Magnetostrictive Actuators

(2)

1.3.7 Piezoelectric/Electrostrictive Actuators

(3)

1.3.8 Photo-Driven Actuators

(2)

1.3.9 Electro/Magnetorheological Fluids

(2)

1.3.10 Bio Actuators

(1)

1.3.11 Comparison among Solid-State Actuators

(1)

1.4 Structure of the Text

(6)

Chapter Essentials

(1)

Check Point

(1)

Chapter Problems

(1)

References

(2)

Chapter 2 A Theoretical Description of Piezoelectricity

(88)

2.1 Ferroelectricity

(7)

2.1.1 Crystal Structure and Ferroelectricity

(1)

2.1.2 Origin of Spontaneous Polarization

(3)

2.1.3 Physical Properties of Ferroelectrics

(3)

2.2 Microscopic Origins of Electric Field---Induced Strains

(1)

2.3 Tensor/Matrix Description of Piezoelectricity

(13)

2.3.1 Tensor Representation

(1)

2.3.2 Crystal Symmetry and Tensor Form

(1)

2.3.3 Matrix Notation

(11)

2.4 Theory of Ferroelectric Phenomenology

(27)

2.4.1 Background of Phenomenology

(1)

2.4.1.1 Polarization Expansion

(1)

2.4.1.2 Temperature Expansion

(1)

2.4.1.3 Stress Expansion

(1)

2.4.2 Landau Theory of the Ferroelectric Phase Transition

(1)

2.4.2.1 The Second-Order Transition

(1)

2.4.2.2 The First-Order Transition

(3)

2.4.3 Phenomenological Description of Electrostriction

(3)

2.4.4 Converse Effects of Electrostriction

(1)

2.4.5 Temperature Dependence of Electrostriction

(1)

2.4.6 Electromechanical Coupling Factor

(1)

2.4.6.1 Piezoelectric Constitutive Equations

(1)

2.4.6.2 Electromechanical Coupling Factor

(5)

2.4.6.3 Intensive and Extensive Parameters

(4)

2.4.7 Crystal Orientation Dependence of Piezoelectricity

(4)

2.4.8 Phenomenology of Antiferroelectrics

(3)

2.5 Phenomenology of Magnetostriction

(2)

2.6 Ferroelectric Domain Reorientation

(11)

2.6.1 Domain Formation

(4)

2.6.2 Strains Accompanied by Ferroelectric Domain Reorientation

(2)

2.6.3 The Uchida-Ikeda Model

(4)

2.6.4 Crystal Structures and Coercive Fields

(1)

2.7 Loss Mechanisms in Piezoelectrics

(12)

2.7.1 Loss Phenomenology in Piezoelectrics

(7)

2.7.2 Loss Measurement Technique---Pseudostatic Method

105

(1)

2.7.3 Heat Generation at Off-Resonance

105

(3)

2.7.4 Microscopic Origins of Extensive Losses

108

(2)

2.8 Piezoelectric Resonance

110

(15)

2.8.1 k31 Longitudinal Vibration Mode

110

(1)

2.8.1.1 Piezoelectric Dynamic Equation

110

(4)

2.8.1.2 Admittance around Resonance and Antiresonance

114

(1)

2.8.1.3 Resonance and Antiresonance Vibration Modes

115

(1)

2.8.2 k33 Longitudinal Vibration Mode

115

(1)

2.8.2.1 Piezoelectric Dynamic Equation

115

(2)

2.8.2.2 Boundary Condition: E-Constant vs. D-Constant

117

(1)

2.8.3 Admittance/Impedance Spectrum Characterization Method

118

(2)

Chapter Essentials

120

(1)

Check Point

121

(1)

Chapter Problems

122

(2)

References

124

(1)

Chapter 3 Actuator Materials

125

(86)

3.1 History of Actuator Materials

125

(3)

3.1.1 Piezoelectric Materials

125

(1)

3.1.2 Shape Memory Alloys

126

(1)

3.1.3 Magnetostrictive Alloys

126

(2)

3.2 Figures of Merit for Transducers

128

(9)

3.2.1 The Piezoelectric/Piezomagnetic Coefficients

129

(1)

3.2.2 The Electromechanical Coupling Factor, k, and Related Quantities

130

(1)

3.2.2.1 The Electromechanical Coupling Factor (k)

130

(1)

3.2.2.2 The Energy Transmission Coefficient (λmax)

130

(4)

3.2.2.3 Efficiency η

134

(1)

3.2.3 Mechanical Quality Factor, QM

134

(1)

3.2.4 Acoustic Impedance, Z

135

(1)

3.2.5 Maximum Vibration Velocity, νmax

136

(1)

3.3 Piezoelectric Transducer Materials

137

(16)

3.3.1 Practical Piezoelectric/Electrostrictive Materials

138

(1)

3.3.1.1 Quartz, Lithium Niobate/Tantalate Single Crystals

138

(1)

3.3.1.2 Perovskite BaTiO3, Lead Zirconate Titanate Piezoelectrics

139

(4)

3.3.1.3 Complex Perovskite Relaxor Ferroelectrics

143

(6)

3.3.1.4 Pb-Free Piezoelectrics

149

(3)

3.3.2 Antiferro- to Ferroelectric Phase-Change Ceramics

152

(1)

3.3.3 Piezoelectric Polymers

152

(1)

3.4 Reliability Issues of Actuator Materials

153

(20)

3.4.1 Temperature Stability in Field-Induced Strain

153

(1)

3.4.1.1 Macroscopic Composite Method

154

(1)

3.4.1.2 Microscopic Approach

154

(2)

3.4.2 Response Speed of Actuators

156

(1)

3.4.2.1 Material Restrictions

156

(1)

3.4.2.2 Device Restriction

157

(2)

3.4.2.3 Drive Circuit Limitation

159

(1)

3.4.3 Mechanical Properties of Actuators

159

(1)

3.4.3.1 Uniaxial Stress Dependence of Piezoelectric/Electrostrictive Strains

159

(2)

3.4.3.2 Mechanical Strength

161

(8)

3.4.3.3 Acoustic Emission in Piezoelectrics

169

(4)

3.5 High-Power Piezoelectrics

173

(27)

3.5.1 Loss and Mechanical Quality Factor Relations

175

(1)

3.5.1.1 Loss and Mechanical Quality Factor in k31 Mode

175

(3)

3.5.1.2 Loss and Mechanical Quality Factor in Other Modes

178

(4)

3.5.2 Heat Generation under Resonance Conditions

182

(1)

3.5.2.1 Vibration Velocity versus Mechanical Quality Factor, Qm

182

(1)

3.5.2.2 Heat Generation under Resonance Conditions

183

(3)

3.5.3 Composition Dependence of High-Power Performances

186

(1)

3.5.3.1 Lead Zirconate Titanate---Based Ceramics

186

(2)

3.5.3.2 Pb-Free Piezoelectrics

188

(2)

3.5.4 Doping Effect on Piezoelectric Losses

190

(1)

3.5.4.1 Hard and Soft Lead Zirconate Titanates

190

(2)

3.5.4.2 Dipole Alignment Models

192

(5)

3.5.5 Grain Size Effect on Hysteresis and Losses

197

(1)

3.5.6 Loss Anisotropy: Crystal Orientation Dependence of Losses

198

(1)

3.5.6.1 Loss Anisotropy in Lead Zirconate Titanate

198

(2)

3.5.6.2 Pb(Mg1/3Nb2/3)O3-PbTiO3 Single Crystal

200

(1)

3.6 High Power Magnetostrictors

200

(11)

3.6.1 Piezomagnetic Loss Equations

200

(2)

3.6.2 Impedance Spectrum Measurement

202

(1)

Chapter Essentials

203

(2)

Checkpoint

205

(1)

Chapter Problems

206

(1)

References

206

(5)

Chapter 4 Ceramic Fabrication Methods and Actuator Designs

211

(56)

4.1 Fabrication Processes of Ceramics and Single Crystals

211

(7)

4.1.1 Preparation of the Ceramic Powders

211

(1)

4.1.1.1 Solid-State Reaction (Mixed-Oxide Method)

211

(1)

4.1.1.2 The Co-Precipitation Method

212

(1)

4.1.1.3 Alkoxide Hydrolysis

213

(1)

4.1.2 The Sintering Process

214

(2)

4.1.3 Single Crystal Growth

216

(1)

4.1.3.1 Quartz, LN, LT

216

(1)

4.1.3.2 Pb(Zn1/3Nb2/3)O3-PbTiO3, Pb(Mg1/3Nb2/3)O3-PbTiO3

216

(1)

4.1.3.3 Pb(Zr1-xTix)O3

216

(1)

4.1.4 Templated Grain Growth

217

(1)

4.2 Size Effect of Ferroelectricity

218

(5)

4.2.1 Grain Size Effect on Ferroelectricity

218

(1)

4.2.2 3D Particle Size Effect on Ferroelectricity

219

(4)

4.3 Actuator/Device Design

223

(21)

4.3.1 Disk Actuators

224

(1)

4.3.2 Multilayer Actuators

225

(7)

4.3.3 Cylindrical Devices

232

(1)

4.3.4 Unimorph/Bimorph/Monomorph

233

(1)

4.3.4.1 Unimorph/Bimorph

233

(5)

4.3.4.2 Monomorph/Rainbow

238

(2)

4.3.5 Flextension/Hinge Lever Amplification Mechanisms

240

(1)

4.3.5.1 Displacement Amplification Mechanism

240

(2)

4.3.5.2 Moonie/Cymbal

242

(1)

4.3.6 Flexible Composites

242

(2)

4.4 Electrode Materials

244

(8)

4.4.1 Actuator Electrodes: An Overview

244

(1)

4.4.2 Ag-Based Electrodes

245

(2)

4.4.3 Base Metal Electrodes

247

(2)

4.4.4 Ceramic Electrodes

249

(1)

4.4.4.1 Ceramic Electrode

249

(1)

4.4.4.2 BaTiO3-Based Multilayer Actuator

249

(1)

4.4.4.3 Mechanical Strength of Ceramic Electrode Devices

250

(2)

4.5 Piezoelectric Thin/Thick Films and Micro-Electro-Mechanical-Systems

252

(15)

4.5.1 Piezoelectric Thin Films

252

(1)

4.5.1.1 Thin Film Fabrication Techniques

252

(1)

4.5.1.2 Orientation Dependence of Piezoelectric Performances

253

(1)

4.5.1.3 Thickness Dependence of Physical Performance

254

(2)

4.5.1.4 Constraints in Thin Films

256

(1)

4.5.2 Piezoelectric Thick Films

257

(1)

4.5.3 Piezoelectric Micro-Electro-Mechanical-Systems

257

(3)

Chapter Essentials

260

(2)

Check Point

262

(1)

Chapter Problems

262

(2)

References

264

(3)

Chapter 5 Drive/Control Techniques for Piezoelectric Actuators

267

(92)

5.1 Classification of Piezoelectric Actuators

267

(2)

5.2 High Power Characterization System

269

(17)

5.2.1 Loss Measuring Technique I: Pseudostatic Method

270

(1)

5.2.2 Loss Measuring Technique II: Admittance Spectrum Method

270

(1)

5.2.2.1 Constant Voltage Drive: Gen I (1980s)

270

(1)

5.2.2.2 Constant Current Drive: Gen II (1990s)

271

(1)

5.2.2.3 Constant Vibration Velocity Method: Gen III (2000s)

272

(4)

5.2.2.4 Real Electric Power Method: Gen V (2010s)

276

(1)

5.2.2.5 Determination Methods of the Mechanical Quality Factor

276

(2)

5.2.3 Loss Measuring Technique III: Transient/Burst Drive Method

278

(1)

5.2.3.1 Pulse Drive Method

278

(1)

5.2.3.2 Burst Mode Method: Gen IV (2010s)

279

(7)

5.3 Feedback Control

286

(18)

5.3.1 The Laplace Transform

286

(3)

5.3.2 The Transfer Function

289

(1)

5.3.2.1 Transfer Function of a Piezoelectric Actuator

289

(2)

5.3.2.2 Transfer Functions of a Position Sensor/Differential Amplifier

291

(1)

5.3.2.3 Block Diagram

292

(1)

5.3.3 Criterion for System Stability

293

(1)

5.3.3.1 Characteristic Equation

293

(1)

5.3.3.2 The Nyquist Criterion for Stability

294

(1)

5.3.4 Steady-State Error

295

(2)

5.3.5 Advantages of Feedback Control

297

(1)

5.3.5.1 Linear Relation between Input and Output

297

(2)

5.3.5.2 Output Response with a Flat Frequency Dependence

299

(1)

5.3.5.3 Minimization of External Disturbance Effects

299

(5)

5.3.6 Polarization Control Method

304

(1)

5.4 Pulse Drive

304

(18)

5.4.1 The Piezoelectric Equations and Vibration Modes

305

(1)

5.4.1.1 Piezoelectric Constitutive Equations

305

(1)

5.4.1.2 Longitudinal Vibration Mode via Transverse Piezoelectric Effect (k31 Mode)

306

(2)

5.4.1.3 Longitudinal Vibration Mode via Longitudinal Piezoelectric Effect (k33 Mode)

308

(1)

5.4.1.4 Other Vibration Modes

309

(1)

5.4.2 Consideration of the Loss

310

(1)

5.4.3 Pulse Drive on the k31 Mode Specimen

310

(1)

5.4.3.1 General Solution for Longitudinal Vibration k31 Mode

310

(2)

5.4.3.2 Displacement Response to a Step Voltage

312

(3)

5.4.3.3 Displacement Response to Pulse Drive

315

(2)

5.4.3.4 Displacement Response to Pseudo-Step Drive

317

(2)

5.4.3.5 Consideration of the Loss in Transient Response

319

(1)

5.4.4 Pulse Width Modulation Method

320

(2)

5.5 Resonance Drive

322

(11)

5.5.1 Piezoelectric Resonance: Reconsideration

322

(2)

5.5.2 Equivalent Circuits for Piezoelectric Vibrators

324

(1)

5.5.2.1 Equivalency between Mechanical and Electrical Systems

324

(1)

5.5.2.2 Equivalent Circuit (Loss-Free) of the k31 Mode

325

(2)

5.5.2.3 Equivalent Circuit (with Losses) of k31 Mode

327

(6)

5.5.2.4 Equivalent Circuit of k33 Mode

333

(1)

5.6 Position/Force Sensors

333

(5)

5.6.1 Position Sensors

334

(1)

5.6.1.1 Resistance Methods

334

(1)

5.6.1.2 Electromagnetic Induction Methods

335

(1)

5.6.1.3 Capacitance Methods

335

(1)

5.6.1.4 Optical Methods

336

(1)

5.6.2 Stress Sensors

336

(2)

5.7 Power Supply/Drive Scheme

338

(21)

5.7.1 Power Supply Specifications

338

(1)

5.7.2 Drive/Control Schemes of Piezoelectric Actuators

339

(1)

5.7.2.1 Off-Resonance (Capacitive) Drive

340

(1)

5.7.2.2 Resonance/Antiresonance (Resistive) Drive

341

(1)

5.7.2.3 Power Minimization (Reactive) Drive

342

(1)

5.7.3 Fundamental Circuit Components

343

(1)

5.7.3.1 Switching Regulator

343

(3)

5.7.3.2 On-Off Signal Generator

346

(1)

5.7.3.3 Piezoelectric Transformer

346

(5)

Chapter Essentials

351

(1)

Check Point

352

(1)

Chapter Problems

353

(3)

References

356

(3)

Chapter 6 Computer Simulation of Piezoelectric Devices

359

(28)

6.1 ATILA Finite-Element Method Software Code

359

(19)

6.1.1 Finite-Element Method Fundamentals

359

(1)

6.1.1.1 Domain and Finite Elements

359

(1)

6.1.1.2 Defining the Equations for the Problem

360

(2)

6.1.1.3 The Variational Principle

362

(1)

6.1.2 Application of Finite-Element Method

362

(1)

6.1.2.1 Discretization of the Domain

362

(1)

6.1.2.2 Shape Functions

363

(3)

6.1.2.3 Parent Elements

366

(3)

6.1.2.4 Discretization of the Variational Form

369

(2)

6.1.2.5 Assembly

371

(1)

6.1.2.6 Computation

372

(1)

6.1.3 ATILA Simulation Examples

373

(1)

6.1.3.1 k31 Resonance/Antiresonance Modes

373

(1)

6.1.3.2 Stress Concentration in a Multilayer Actuator

374

(1)

6.1.3.3 Metal Tube Motor

375

(1)

6.1.3.4 Piezoelectric Transformer

376

(2)

6.2 PSpice Circuit Analysis Software

378

(4)

6.2.1 k31-Type Piezoplate Simulation with Institute of Electrical and Electronics Engineers Equivalent Circuit

378

(2)

6.2.2 k31 Piezoplate Equivalent Circuit Simulation with Three Losses

380

(2)

6.3 Summary

382

(5)

Chapter Essentials

382

(1)

Check Point

383

(1)

Chapter Problems

384

(1)

References

384

(3)

Chapter 7 Piezoelectric Energy-Harvesting Systems

387

(32)

7.1 Background

387

(14)

7.1.1 Necessity of Piezoelectric Energy Harvesting

387

(1)

7.1.2 From Passive Damping to Energy Harvesting

387

(1)

7.1.3 Recent Research Trends

388

(1)

7.1.3.1 Mechanical Engineers' Approach

389

(2)

7.1.3.2 Electrical Engineers' Approach

391

(1)

7.1.3.3 Micro-Electro-Mechanical Systems Engineers' Approach

391

(1)

7.1.3.4 Military Application: Programmable Air-Burst Munition

392

(1)

7.1.4 Piezoelectric Energy-Harvesting Principles

392

(1)

7.1.4.1 Piezoelectric Constitutive Equations

392

(1)

7.1.4.2 Piezoelectric Figures of Merit: Review

392

(6)

7.1.4.3 Piezoelectric Passive Damper

398

(2)

7.1.5 Three Phases in the Energy-Harvesting Process

400

(1)

7.2 Mechanical-to-Mechanical Energy Transfer

401

(2)

7.3 Mechanical-Electrical Energy Transduction

403

(6)

7.3.1 Figure of Merit

403

(1)

7.3.2 Piezoelectric Material Selection

404

(1)

7.3.3 Design Optimization

404

(1)

7.3.3.1 Cymbal

404

(1)

7.3.3.2 Flexible Transducer

405

(2)

7.3.4 Energy Flow Analysis

407

(2)

7.4 Electrical-to-Electrical Energy Transfer

409

(2)

7.4.1 DC-DC Converter

409

(1)

7.4.2 Multilayered Cymbal

410

(1)

7.4.3 Usage of a Piezoelectric Transformer: Further Impedance Matching

410

(1)

7.5 Total Energy Flow Consideration

411

(2)

7.6 Hybrid Energy Harvesting: Magnetoelectric DEVICES and the Future

413

(6)

Chapter Essentials

415

(1)

Check Point

416

(1)

Chapter Problems

416

(1)

References

417

(2)

Chapter 8 Servo Displacement Transducer Applications

419

(26)

8.1 Deformable Mirrors

419

(5)

8.1.1 Monolithic Piezoelectric Deformable Mirror

419

(1)

8.1.2 Multimorph Deformable Mirror

419

(3)

8.1.3 Articulating Fold Mirror

422

(2)

8.2 Camera Lens Control

424

(3)

8.2.1 Helimorph

425

(1)

8.2.2 Deformable Lens

425

(2)

8.3 Microscope Stages

427

(1)

8.4 High-Precision Linear Motion Devices

428

(4)

8.4.1 Ultrahigh-Precision Linear Motion Guide Mechanism

429

(3)

8.4.2 Ultraprecise x-y Stage

432

(1)

8.5 Hydraulic Servo Valves

432

(6)

8.5.1 Oil Pressure Servo Valves with Ceramic Actuators

433

(5)

8.5.2 Air Pressure Servo Valves

438

(1)

8.5.3 Direct Drive Spool Servo Valve

438

(1)

8.6 Vibration and Noise Suppression Systems

438

(7)

8.6.1 Vibration Damping

438

(1)

8.6.2 Noise Elimination

439

(1)

8.6.2.1 Acoustic Stealth and Sound Elimination

439

(2)

8.6.2.2 Noise Barrier

441

(1)

Chapter Essentials

441

(1)

Check Point

442

(1)

Chapter Problems

442

(1)

References

442

(3)

Chapter 9 Pulse Drive Motor Applications

445

(20)

9.1 Imaging System Applications

445

(1)

9.1.1 Swing Charge-Coupled Device Image Sensors

445

(1)

9.1.2 Swing Pyroelectric Sensor

446

(1)

9.2 Inchworm Devices

446

(3)

9.2.1 Microangle Goniometer

447

(1)

9.2.2 Linear Walking Machines

448

(1)

9.3 Impulse Drive Motors

449

(2)

9.3.1 Stator Impulse Drive

449

(1)

9.3.2 Slider Impulse Drive

450

(1)

9.4 Piezoelectric Relays

451

(2)

9.4.1 Piezoelectric Relays

451

(1)

9.4.2 Shape-Memory Ceramic Relays

452

(1)

9.4.3 Piezoelectric Micro-Electro-Mechanical System Relay

452

(1)

9.5 Automobile Adaptive Suspension System

453

(1)

9.6 Inkjet Printers

454

(4)

9.6.1 Basic Design of the Piezoelectric Inkjet Printer Head

455

(1)

9.6.2 Integrated Piezo-Segment Printer Head (Piezo Bimorph)

455

(3)

9.6.3 Piezo Multilayer Inkjet

458

(1)

9.7 Diesel Piezo-Injection Valve

458

(7)

9.7.1 Piezo-Actuator Material Development

459

(1)

9.7.2 Multilayer Design

460

(1)

9.7.3 Diesel Injection Valve Assembly

461

(1)

Chapter Essentials

461

(1)

Checkpoint

462

(1)

Chapter Problems

462

(1)

References

463

(2)

Chapter 10 Ultrasonic Motor Applications

465

(58)

10.1 Background of Ultrasonic Motors

465

(2)

10.2 Classification of Ultrasonic Motors

467

(3)

10.2.1 Standing-Wave Motor Principles

468

(1)

10.2.2 Traveling-Wave Motor Principle

469

(1)

10.2.3 Ultrasonic Motor Classification

470

(1)

10.3 Standing-Wave Motors

470

(6)

10.3.1 Standing-Wave Rotary Motors

470

(1)

10.3.1.1 Vibratory Piece Motor (Shinsei)

470

(1)

10.3.1.2 Hollow Piezoceramic Cylinder Motor (Tokin)

471

(1)

10.3.1.3 Metal Tube Motor

471

(2)

10.3.2 Standing-Wave Linear Motors

473

(1)

10.3.2.1 π-Shaped Linear Motor

473

(2)

10.3.2.2 Poly-Vinylidene-Difluoride Walker

475

(1)

10.4 Mixed-Mode Motors

476

(3)

10.4.1 "Kumada" Motor

476

(1)

10.4.2 "Windmill" Motors

476

(1)

10.4.3 Dual-Vibration Coupler Motors

477

(1)

10.4.4 Piezoceramic Multilayer Ultrasonic Motor

478

(1)

10.5 Traveling-Wave Motors

479

(12)

10.5.1 Traveling-Wave Linear Motors

479

(4)

10.5.2 Traveling-Wave Rotary Motors

483

(1)

10.5.2.1 Basics of Traveling-Wave Rotary Motors

483

(1)

10.5.2.2 Sashida's "Surfing" Rotary Motors

484

(3)

10.5.2.3 Other "Surfing" Traveling-Wave Motors

487

(1)

10.5.2.4 Disk and Rod Traveling-Wave Motors

488

(1)

10.5.2.5 A-Shaped Motors

489

(2)

10.6 Mode Rotation Motors

491

(1)

10.7 Comparison among Various Ultrasonic Motors and Their System Integration

492

(3)

10.7.1 Comparison among Various Ultrasonic Motors

492

(1)

10.7.2 System Integration of the Ultrasonic Motor

493

(2)

10.8 Calculations for the Speed and Thrust of Ultrasonic Motors

495

(4)

10.8.1 Surface Wave Motor Calculations

495

(1)

10.8.2 Vibration Coupler Motor Calculations

496

(1)

10.8.2.1 Normal Force Assumption

497

(1)

10.8.2.2 Slider Speed Assumption

497

(1)

10.8.2.3 Thrust Calculation Assumption

498

(1)

10.9 Designing Flow of the Ultrasonic Motor

499

(6)

10.9.1 Defining the Specifications of the Motor

500

(1)

10.9.2 Determining the Size of the Piezoelectric Actuator

500

(1)

10.9.3 Determining the Size of the Vibratory Piece

500

(1)

10.9.3.1 Analytical Approach

500

(2)

10.9.3.2 Finite-Element Method Simulation

502

(1)

10.9.4 Determining the Rail Size

502

(1)

10.9.5 Selecting the Proper Drive Conditions

502

(1)

10.9.5.1 Impedance Spectrum Measurement

502

(1)

10.9.5.2 Stator Operation Test

503

(1)

10.9.6 Checking the Motor Specifications

504

(1)

10.10 Reliability of Ultrasonic Motors

505

(3)

10.10.1 Heat Generation

505

(1)

10.10.2 Frictional Coating and Motor Lifetime

506

(1)

10.10.3 Drive and Control of the Ultrasonic Motor

507

(1)

10.11 Resonance Impulse Motors

508

(7)

10.11.1 Problems in Smooth Impact Drive Mechanisms

509

(1)

10.11.2 Higher-Order Harmonics Combination

509

(1)

10.11.3 Variable Duty-Ratio Rectangular Pulse Drive

509

(4)

10.11.4 "Stick & Slip" Motion Model

513

(1)

10.11.5 Drive Technique Summary

513

(2)

10.12 Other Ultrasonic Devices

515

(8)

10.12.1 Ultrasonic Surgical Knife

515

(1)

10.12.2 Piezoelectric Pump/Fan

516

(1)

10.12.2.1 Piezoelectric Pumps

516

(1)

10.12.2.2 Piezoelectric Fans

517

(2)

10.12.2.3 Evaporators

519

(1)

10.12.3 Magnetic Actuators

519

(1)

Chapter Essentials

519

(1)

Check Point

520

(1)

Chapter Problems

520

(1)

References

521

(2)

Chapter 11 The Future of Solid State Actuators in Micromechatronic Systems

523

(18)

11.1 Piezoelectric Device Market Trends

523

(1)

11.2 Engineering History

523

(3)

11.2.1 History of Solid-State Actuators

523

(2)

11.2.2 History of Piezoelectricity

525

(1)

11.2.3 Engineering Trends after World War II

525

(1)

11.3 Recent Research Trends and the Future Perspectives

526

(7)

11.3.1 Performance to Reliability

526

(1)

11.3.1.1 Pb-Free Piezoelectric Ceramics

526

(1)

11.3.1.2 Biodegradable Polymers

527

(1)

11.3.1.3 Low-Loss Piezoelectrics

527

(1)

11.3.2 Hard to Soft

528

(1)

11.3.2.1 Elastomer Actuators

528

(1)

11.3.2.2 Electrostrictive Polymers

528

(1)

11.3.2.3 Lead Zirconate Titanate Composites

529

(1)

11.3.2.4 Large Strain Ceramics

529

(1)

11.3.3 Macro to Nano

529

(1)

11.3.4 Homo to Hetero

530

(1)

11.3.5 Single to Multifunctional

531

(1)

11.3.5.1 Magnetoelectric Effect

532

(1)

11.3.5.2 Photostriction

532

(1)

11.4 New Application Development

533

(8)

11.4.1 Normal Technologies

533

(1)

11.4.1.1 Ultrasonic Disposal Technology

534

(1)

11.4.1.2 Reduction of Contamination Gas

534

(1)

11.4.1.3 New Energy Harvesting Systems

534

(2)

11.4.2 Crisis Technology

536

(1)

Chapter Essentials

536

(1)

Check Point

537

(1)

Chapter Problems

537

(1)

References

538

(3)

Index

541

Kenji Uchino, a pioneer in piezoelectric actuators, is the Founding Director of the International Center for Actuators and Transducers (ICAT) and Professor of Electrical Engineering and Materials Science & Engineering at the Pennsylvania State University. He was Associate Director (Navy Ambassador to Japan) at The US Office of Naval Research Global Tokyo Office as IPA from 2010 till 2014. He was also the Founder and Senior Vice President & CTO of Micromechatronics Inc., State College, PA.

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E-grāmata: MicroMechatronics, Second Edition

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