Foreword |
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vii | |
Preface |
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ix | |
List of Selected Symbols |
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xix | |
Chapter 1 Introduction |
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1 | |
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1.1 MOS integrated circuits |
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1 | |
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1.2 Compact MOSFET models for circuit analysis and design |
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2 | |
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1.3 A brief history of compact MOS transistor models |
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3 | |
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5 | |
Chapter 2 The MOS Capacitor |
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7 | |
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2.1 Equilibrium electron and hole concentrations |
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7 | |
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2.2 The field effect in bulk semiconductors |
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9 | |
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2.2.1 Fundamental considerations |
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9 | |
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2.2.2 Poisson-Boltzmann equation in bulk semiconductors |
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10 | |
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2.3 The ideal two-terminal MOS structure |
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14 | |
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2.3.1 Small signal equivalent capacitive circuit |
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17 | |
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21 | |
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2.3.3 Effect of work function difference |
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26 | |
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2.3.4 The flat-band voltage |
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29 | |
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2.4 The three-terminal MOS structure with uniformly doped substrate |
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32 | |
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2.4.1 Quasi-equilibrium electron and hole concentrations |
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32 | |
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2.4.2 Surface potential master equation |
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35 | |
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2.4.3 Small-signal equivalent capacitive circuit in inversion |
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38 | |
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2.4.4 Basic approximations for compact modeling |
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41 | |
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2.4.4.1 The charge-sheet approximation |
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41 | |
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2.4.4.2 The approximate linear relationship between inversion charge density and surface potential |
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43 | |
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2.4.5 The pinch-off voltage |
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45 | |
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2.4.6 The unified charge control model (UCCM) |
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2.4.7 Comparison between charge-sheet model and UCCM |
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49 | |
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2.5. Real C-V curves: Interface traps, polysilicon depletion, and quantum effects |
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51 | |
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2.5.1 Interface-trap capacitance |
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52 | |
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2.5.2 Polysilicon depletion |
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54 | |
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2.5.3 Quantum mechanical (QM) effects on the semiconductor capacitance |
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57 | |
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61 | |
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64 | |
Chapter 3 The Long-Channel MOSFET: Theory and dc Equations |
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67 | |
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3.1 A brief history of MOSFET theory |
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67 | |
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71 | |
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3.3 The Pao-Sah exact I-V model |
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73 | |
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3.4 Compact surface potential MOSFET models |
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79 | |
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3.4.1 Linearized surface potential models |
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83 | |
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3.4.2 Brews-van de Wiele charge-sheet formula for the current |
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3.5 Charge control compact model |
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3.6 Comparison between models |
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86 | |
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3.7 Design-oriented MOSFET model |
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88 | |
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3.7.1 Forward and reverse components of the drain current |
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88 | |
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3.7.2 Asymptotic behavior of the drain current in weak and strong inversion |
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91 | |
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3.7.3 Universal dc characteristics |
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94 | |
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3.7.4 Small-signal transconductances |
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98 | |
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3.7.5 The transconductance-to-current ratio |
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101 | |
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3.7.6 Small-signal MOSFET model at low frequencies |
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103 | |
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105 | |
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107 | |
Chapter 4 The Real MOS Transistor: de Models |
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113 | |
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113 | |
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119 | |
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4.3 Saturation charge and saturation voltage |
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122 | |
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4.4 Channel length modulation |
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127 | |
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4.5 Effect of source and drain resistances |
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129 | |
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129 | |
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4.7 Short and narrow channel effects |
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131 | |
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4.7.1 Short-channel effect |
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131 | |
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4.7.2 Reverse short-channel effect |
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134 | |
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4.7.3 Narrow-channel effect |
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135 | |
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4.7.4 Drain-induced barrier lowering |
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137 | |
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4.7.5 Temperature effect on the threshold voltage |
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139 | |
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4.8 Impact of small geometry effects on transistor model |
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140 | |
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4.9 Benchmark tests for dc MOSFET models for circuit simulation |
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144 | |
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4.9.1 Series-parallel association of transistors |
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145 | |
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4.9.2 Gummel symmetry test |
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149 | |
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151 | |
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154 | |
Chapter 5 Stored Charges and Capacitive Coefficients |
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157 | |
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5.1 Transient analysis of the MOS transistor |
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158 | |
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5.1.1 The continuity equation |
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158 | |
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5.1.2 Definitions of source and drain charges |
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159 | |
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5.2 Quasi-static charge-conserving model |
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163 | |
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163 | |
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5.2.1.1 Symbolic MOSFET model |
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164 | |
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5.2.1.2 Stored charge calculations |
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165 | |
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170 | |
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5.2.3 Capacitive coefficients |
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171 | |
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5.2.3.1 Intrinsic small-signal models |
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173 | |
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5.2.3.2 Calculation of the capacitive coefficients |
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175 | |
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5.2.3.3 Charge conservation and transcapacitances |
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183 | |
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5.2.3.4 Intrinsic transition frequency |
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185 | |
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5.3 Charges and capacitances of the extrinsic transistor |
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188 | |
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5.4 Small-dimension effects on charges and capacitances |
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190 | |
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5.4.1 Effect of velocity saturation on stored charges |
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190 | |
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5.4.2 Effect of velocity saturation on capacitances |
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194 | |
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5.4.3 Other small-dimension effects on capacitances |
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199 | |
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201 | |
Chapter 6 Mismatch Modeling |
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203 | |
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203 | |
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6.2 Random mismatch in MOS transistors |
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204 | |
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6.3 Consistent model for drain current fluctuation |
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206 | |
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6.4 Number fluctuation mismatch model |
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207 | |
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6.5 Specific current mismatch |
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212 | |
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6.6 Mismatch model in terms of inversion level |
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213 | |
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6.7 Experimental results and discussion |
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215 | |
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222 | |
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224 | |
Chapter 7 Noise in MOSFETs |
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227 | |
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227 | |
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227 | |
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229 | |
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231 | |
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7.2 Noise modeling using the impedance field method |
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232 | |
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7.2.1 Thermal noise in MOSFETs |
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236 | |
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7.2.2 Flicker noise in MOSFETs |
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236 | |
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7.2.2.1 Measurement results |
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240 | |
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7.3 Consistency of noise models |
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243 | |
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7.4 Design-oriented noise models |
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246 | |
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7.4.1 Relationship between thermal noise and transconductance |
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246 | |
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7.4.2 Flicker noise in terms of inversion levels |
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247 | |
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7.4.3 The corner frequency |
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250 | |
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7.5 Small-dimension effects on MOSFET noise |
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251 | |
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7.5.1 Review of the effect of velocity saturation on the drain current |
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251 | |
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7.5.2 The impedance field for short channel MOSFETs |
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253 | |
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7.5.3 Drain current noise of short channel MOSFETs |
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255 | |
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260 | |
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262 | |
Chapter 8 High-Frequency Models |
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265 | |
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265 | |
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8.2 Non quasi-static operation of the MOSFET |
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266 | |
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8.3 Non-quasi-static small-signal model |
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267 | |
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8.4 The y-parameter model |
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275 | |
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280 | |
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281 | |
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290 | |
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292 | |
Chapter 9 Gate and Bulk Currents |
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293 | |
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9.1 Gate tunneling current |
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293 | |
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9.1.1 Tunneling through a potential barrier |
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294 | |
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9.1.2 Compact model for tunneling in MOS structures |
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295 | |
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297 | |
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9.1.2.2 Equations for the tunneling current |
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299 | |
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9.1.2.3 Comparison between models |
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301 | |
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9.1.2.4 Partition of the gate current into source and drain components |
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303 | |
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306 | |
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9.2.1 Gate induced drain leakage |
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306 | |
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9.2.2 Impact ionization current |
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308 | |
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308 | |
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313 | |
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315 | |
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317 | |
Chapter 10 Advanced MOSFET Structures |
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319 | |
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319 | |
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10.2 Deep submicron planar MOS transistor structures |
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320 | |
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10.3 Silicon-on-insulator (SOI) CMOS transistors |
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324 | |
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10.3.1 Pinch-off voltage calculation |
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334 | |
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10.4 Undoped surrounding-gate transistors |
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338 | |
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10.5 Multiple-gate transistors |
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343 | |
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345 | |
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348 | |
Chapter 11 MOSFET Parameter Extraction |
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349 | |
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349 | |
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11.2 Threshold voltage and short-channel effects |
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350 | |
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11.3 Specific current and effective channel length and width |
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355 | |
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11.4 Slope factor and subthreshold slope |
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357 | |
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11.5 Mobility degradation with transversal field |
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359 | |
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363 | |
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364 | |
Chapter 12 Advanced MOSFET Models for Circuit Simulators |
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367 | |
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12.1 Surface potential- vs. inversion charge-based models |
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368 | |
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369 | |
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370 | |
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373 | |
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375 | |
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12.3 Surface potential models |
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376 | |
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378 | |
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380 | |
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382 | |
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383 | |
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386 | |
Appendix A Electrostatics in One Dimension |
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387 | |
Appendix B Electrostatics in Semiconductors |
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391 | |
Appendix C Drift-diffusion Current Model |
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393 | |
Appendix D Continuity Equations |
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397 | |
Appendix E Basics of pn Junctions |
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399 | |
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E.1 Electrostatics in equilibrium |
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400 | |
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E.2 Electrostatics of forward- and reverse-biased junction |
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401 | |
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E.3 Quasi-Fermi potentials in the pn-junction |
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402 | |
Appendix F Hall-Shockley-Read (HSR) Statistics |
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405 | |
Appendix G Interface Trap Capacitance |
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409 | |
Index |
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415 | |