Preface |
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xiii | |
Acknowledgements |
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xv | |
Introduction to an Exotic Device World |
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xvii | |
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Part One BRIEF REVIEW AND MODERN APPLICATIONS OF PN-JUNCTION DEVICES |
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1 Concept of an Ideal pn Junction |
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3 | (4) |
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4 | (3) |
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2 Understanding the Non-ideal pn Junction -- Theoretical Reconsideration |
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7 | (32) |
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7 | (1) |
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2.2 Bulk pn-Junction Diode |
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8 | (16) |
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8 | (1) |
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2.2.2 Model A -- Low Doping Case |
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9 | (9) |
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2.2.3 Model B -- High Doping Case |
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18 | (6) |
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2.3 Bulk pn-Junction Diode -- Reverse Bias |
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24 | (8) |
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2.3.1 Model A -- Low Doping Case |
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24 | (1) |
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2.3.2 Model B -- High Doping Case |
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25 | (7) |
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2.4 The Insulated-Gate pn Junction of the SOI Lubistor -- Forward Bias |
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32 | (3) |
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2.4.1 The Positive Gate Voltage Condition |
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32 | (3) |
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2.4.2 The Negative Gate Voltage Condition |
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35 | (1) |
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2.5 The Insulated-Gate pn Junction of the SOI Lubistor -- Reverse Bias |
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35 | (4) |
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37 | (2) |
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3 Modern Applications of the pn Junction |
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39 | (4) |
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40 | (3) |
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Part Two PHYSICS AND MODELING OF SOI LUBISTORS -- THICK-FILM DEVICES |
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4 Proposal of the Lateral, Unidirectional, Bipolar-Type Insulated-Gate Transistor (Lubistor) |
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43 | (6) |
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43 | (1) |
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4.2 Device Structure and Parameters |
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43 | (2) |
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4.3 Discussion of Current-Voltage Characteristics |
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45 | (2) |
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47 | (2) |
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47 | (2) |
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5 Experimental Consideration for Modeling of Lubistor Operation |
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49 | (14) |
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49 | (1) |
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5.2 Experimental Apparatus |
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49 | (3) |
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5.3 Current--Voltage Characteristics of Lubistors |
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52 | (4) |
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5.4 Lubistor Potential Profiles and Features |
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56 | (1) |
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57 | (4) |
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5.5.1 Simplified Analysis of Lubistor Operation |
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57 | (3) |
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5.5.2 On the Design of Lubistors |
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60 | (1) |
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61 | (2) |
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61 | (2) |
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6 Modeling of Lubistor Operation Without an EFS Layer for Circuit Simulations |
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63 | (12) |
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63 | (1) |
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6.2 Device Structure and Measurement System |
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63 | (2) |
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6.3 Equivalent Circuit Models of an SOI Lubistor |
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65 | (7) |
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65 | (3) |
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6.3.2 Equivalent Circuit Models |
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68 | (4) |
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72 | (3) |
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73 | (2) |
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7 Noise Characteristics and Modeling of Lubistor |
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75 | (14) |
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75 | (1) |
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75 | (2) |
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75 | (2) |
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77 | (66) |
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7.3 Results and Discussion |
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77 | (9) |
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7.3.1 I-V Characteristics of an SOI Lubistor and a Simple Analytical Model |
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77 | (4) |
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7.3.2 Noise Spectral Density of SOI Lubistors and Their Feature |
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81 | (2) |
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7.3.3 Advanced Analysis of Anode Noise Spectral Density |
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83 | (3) |
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86 | (3) |
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86 | (3) |
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8 Supplementary Study on Buried Oxide Characterization |
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89 | (16) |
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89 | (1) |
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8.2 Physical Model for the Transition Layer |
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90 | (3) |
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8.3 Capacitance Simulation |
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93 | (2) |
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8.3.1 A Structure to Evaluate Capacitance |
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93 | (1) |
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8.3.2 Numerical Simulation Technique |
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94 | (1) |
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95 | (1) |
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8.5 Results and Discussion |
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96 | (5) |
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8.5.1 Electrode-to-Electrode Capacitance Dependence on Frequency |
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96 | (2) |
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8.5.2 Drain-to-Substrate Capacitance Dependence on Bias |
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98 | (3) |
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8.5.3 Electrode-to-Electrode Capacitance Dependence on Transition Layer Thickness |
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101 | (1) |
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101 | (4) |
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102 | (3) |
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Part Three PHYSICS AND MODELING OF SOI LUBISTORS -- THIN-FILM DEVICES |
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9 Negative Conductance Properties in Extremely Thin SOI Lubistors |
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105 | (6) |
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105 | (1) |
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9.2 Device Fabrication and Measurements |
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105 | (1) |
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9.3 Results and Discussion |
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106 | (3) |
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109 | (2) |
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109 | (2) |
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10 Two-Dimensionally Confined Injection Phenomena at Low Temperatures in Sub-10-nm-Thick SOI Lubistors |
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111 | (16) |
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111 | (1) |
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111 | (3) |
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70.2.7 Anode Common Configuration |
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113 | (1) |
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10.2.2 Cathode Common Configuration |
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113 | (1) |
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10.3 Physical Models and Simulations |
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114 | (8) |
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10.3.1 Fundamental Models |
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114 | (4) |
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10.3.2 Theoretical Simulations |
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118 | (4) |
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10.3.3 Influences on Characteristics of Extremely Ultra-Thin SOI MOSFET Devices |
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122 | (1) |
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122 | (5) |
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Appendix 10A Intrinsic Carrier Concentration (niq) and the Fermi Level in 2DSS |
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122 | (3) |
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Appendix 10B Calculation of Electron and Hole Densities in 2DSS |
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125 | (1) |
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125 | (2) |
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11 Two-Dimensional Quantization Effect on Indirect Tunneling in SOI Lubistors with a Thin Silicon Layer |
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127 | (16) |
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127 | (1) |
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11.2 Experimental Results |
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128 | (6) |
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11.2.1 Junction Current Dependence on Anode Voltage |
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128 | (4) |
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11.2.2 Junction Current Dependence on Gate Voltage |
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132 | (2) |
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11.3 Theoretical Discussion |
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134 | (6) |
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11.3.1 Qualitative Consideration of the Low-Dimensional Indirect Tunneling Process |
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134 | (1) |
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11.3.2 Theoretical Formulations of Tunneling Current and Discussion |
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134 | (6) |
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140 | (3) |
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Appendix 11A Wave Function Coupling Effect in the Lateral Two-Dimensional-System-to-Three-Dimensional-System (2D-to-3D) Tunneling Process |
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141 | (1) |
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141 | (2) |
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12 Experimental Study of Two-Dimensional Confinement Effects on Reverse-Biased Current Characteristics of Ultra-Thin SOI Lubistors |
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143 | (12) |
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143 | (1) |
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12.2 Device Structures and Experimental Apparatus |
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144 | (1) |
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12.3 Results and Discussion |
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145 | (6) |
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12.3.1 I-V Characteristics under the Reverse-Biased Condition |
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145 | (6) |
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151 | (4) |
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Appendix 12A Derivation of Equations (12.6) and (12.9) |
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151 | (2) |
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153 | (2) |
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13 Supplementary Consideration of I-V Characteristics of Forward-Biased Ultra-Thin Lubistors |
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155 | (4) |
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155 | (1) |
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13.2 Device Structures and Bias Configuration |
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155 | (1) |
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13.3 Results and Discussion |
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156 | (1) |
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157 | (2) |
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158 | (1) |
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14 Gate-Controlled Bipolar Action in the Ultra-Thin Dynamic Threshold SOI MOSFET |
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159 | (8) |
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159 | (1) |
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14.2 Device and Experiments |
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159 | (1) |
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14.3 Results and Discussion |
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159 | (3) |
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14.3.1 ID--VG and IG--VG Characteristics of the Ultra-Thin-Body DT-MOSFET |
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159 | (3) |
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14.3.2 Control of Bipolar Action by the MOS Gate |
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162 | (1) |
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14.4 Channel Polarity Dependence of Bipolar Action |
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162 | (4) |
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14.4.1 ID--VG and gm--VG Characteristics of the Ultra-Thin-Body DT-MOSFET |
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162 | (1) |
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14.4.2 Difference of Bipolar Operation between the n-Channel DT-MOS and the p-Channel DT-MOS |
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163 | (1) |
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14.4.3 Impact of Body Thickness on Bipolar Operation |
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164 | (2) |
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166 | (1) |
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166 | (1) |
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15 Supplementary Study on Gate-Controlled Bipolar Action in the Ultra-Thin Dynamic Threshold SOI MOSFET |
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167 | (12) |
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167 | (1) |
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15.2 Device Structures and Parameters |
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167 | (2) |
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15.3 Results and Discussion |
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169 | (4) |
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15.3.7 SOI MOSFET Mode and DT-MOSFET Mode |
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169 | (1) |
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15.3.2 Temperature Evolution of Transconductance (gm) Characteristics and Impact of Channel Length on gm Characteristics |
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170 | (3) |
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15.3.3 Impact of SOI Layer Thickness on gm Characteristics |
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173 | (1) |
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173 | (6) |
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174 | (5) |
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Part Four CIRCUIT APPLICATIONS |
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16 Subcircuit Models of SOI Lubistors for Electrostatic Discharge Protection Circuit Design and Their Applications |
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179 | (20) |
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179 | (1) |
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16.2 Equivalent Circuit Models of SOI Lubistors and their Applications |
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180 | (3) |
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16.2.1 Device Structure and Device Simulation |
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180 | (3) |
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16.2.2 Equivalent Circuit Models |
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183 | (1) |
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16.3 ESD Protection Circuit |
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183 | (3) |
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16.4 Direct Current Characteristics of the ESD Protection Devices and Their SPICE Models |
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186 | (3) |
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16.5 ESD Event and Performance Evaluation of an ESD Protection Circuit |
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189 | (7) |
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196 | (3) |
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196 | (3) |
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17 A New Basic Element for Neural Logic Functions and Capability in Circuit Applications |
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199 | (14) |
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199 | (1) |
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17.2 Device Structure, Model, and Proposal of a New Logic Element |
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199 | (7) |
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17.2.1 Device Structure and Fundamental Characteristics |
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199 | (2) |
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17.2.2 Device Model for the Lubistor |
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201 | (2) |
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17.2.3 Proposal of a New Logic Element |
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203 | (3) |
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17.3 Circuit Applications and Discussion |
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206 | (5) |
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17.3.1 Examples of Fundamental Elements for Circuit Applications |
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206 | (5) |
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17.3.2 On the Further Improvement of Functions of the Basic Logic Element |
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211 | (1) |
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211 | (2) |
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211 | (2) |
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18 Sub-1-V Voltage Reference Circuit Technology as an Analog Circuit Application |
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213 | (4) |
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18.1 Review of Bandgap Reference |
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213 | (1) |
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18.2 Challenging Study of Sub-1-V Voltage Reference |
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214 | (3) |
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215 | (2) |
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19 Possible Implementation of SOI Lubistors into Conventional Logic Circuits |
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217 | (6) |
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218 | (5) |
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Part Five OPTICAL DEVICE APPLICATIONS OF SOI LUBISTORS |
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20 Potentiality of Electro-Optic Modulator Based on the SOI Waveguide |
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223 | (14) |
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223 | (1) |
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20.2 Characterization of the Quasi-One-Dimensional Photonic Crystal Waveguide |
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224 | (6) |
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20.3 Electro-Optic Modulator Based on the SOI Waveguide |
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230 | (3) |
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233 | (4) |
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234 | (3) |
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Part Six SOI LUBISTOR AS A TESTING TOOL |
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21 Principles of Parameter Extraction |
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237 | (4) |
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239 | (2) |
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22 Charge Pumping Technique |
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241 | (8) |
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241 | (1) |
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22.2 Experimental and Simulation Details |
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241 | (2) |
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22.3 Results and Discussion |
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243 | (3) |
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246 | (3) |
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246 | (3) |
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Part Seven FUTURE PROSPECTS |
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249 | (12) |
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249 | (1) |
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249 | (2) |
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251 | (3) |
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254 | (2) |
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23.5 Potential of Offset-Gate Lubistor |
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256 | (2) |
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23.6 Si Fin LED with a Multi-quantum Well |
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258 | (1) |
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23.7 Future of the pn Junction |
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258 | (3) |
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259 | (2) |
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24 Feasibility of the Lubistor-Based Avalanche Phototransistor |
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261 | (12) |
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261 | (1) |
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24.2 Theoretical Formulation of the Avalanche Phenomenon in Direct-Bandgap Semiconductors |
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261 | (3) |
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24.3 Theoretical Formulation of the Avalanche Phenomenon in Indirect-Bandgap Semiconductors |
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264 | (1) |
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24.4 Theoretical Consideration of the Avalanche Phenomenon in a One-Dimensional Wire pn Junction |
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265 | (4) |
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269 | (4) |
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269 | (4) |
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Part Eight SUMMARY OF PHYSICS FOR SEMICONDUCTOR DEVICES AND MATHEMATICS FOR DEVICE ANALYSES |
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25 Physics of Semiconductor Devices for Analysis |
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273 | (16) |
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25.1 Free Carrier Concentration and the Fermi Level in Semiconductors |
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273 | (2) |
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25.2 Impurity Doping in Semiconductors |
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275 | (1) |
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25.3 Drift and Diffusion of Carriers and Current Continuity in Semiconductors |
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275 | (1) |
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25.4 Stationary-State Schrodinger Equation to Analyze Quantum-Mechanical Effects in Semiconductors |
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276 | (1) |
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25.5 Time-dependent Schrodinger Equation to Analyze Dynamics in Semiconductors |
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277 | (1) |
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25.6 Quantum Size Effects in Nano-Scale Semiconductors |
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278 | (3) |
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25.7 Tunneling through Energy Barriers in Semiconductors |
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281 | (1) |
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25.8 Low-Dimensional Tunneling in Nano-Scale Semiconductors |
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282 | (2) |
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25.9 Photon Absorption and Electronic Transitions |
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284 | (5) |
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25.9.1 Fundamental Formulations |
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284 | (1) |
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25.9.2 Interband Transition -- Direct Bandgap |
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285 | (1) |
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25.9.3 Interband Transition -- Indirect Bandgap |
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286 | (1) |
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287 | (2) |
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26 Mathematics Applicable to the Analysis of Device Physics |
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289 | (4) |
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26.1 Linear Differential Equation |
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289 | (1) |
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290 | (1) |
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26.3 Klein--Gordon-Type Differential Equation |
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291 | (2) |
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292 | (1) |
Bibliography |
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293 | (2) |
Index |
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295 | |