Acknowledgments |
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xv | |
1 Basic Memory Device Trends Toward the Vertical |
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1 | (24) |
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1.1 Overview of 3D Vertical Memory Book |
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1 | (1) |
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1.2 Moore's Law and Scaling |
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2 | (1) |
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3 | (10) |
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1.3.1 SRAM as the First 3D Memory |
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3 | (3) |
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1.3.2 An Early 3D MemoryThe FinFET SRAM |
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6 | (1) |
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1.3.3 Early Progress in 3D DRAM Trench and Stack Capacitors |
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6 | (5) |
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1.3.4 3D as the Next Step for Embedded RAM |
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11 | (2) |
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1.4 Early Nonvolatile Memories Evolve to 3D |
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13 | (7) |
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1.4.1 NOR Flash MemoryBoth Standalone and Embedded |
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13 | (1) |
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1.4.2 The Charge-Trapping EEPROM |
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14 | (1) |
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1.4.3 Thin-Film Transistor Takes Nonvolatile Memory into 3D |
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15 | (2) |
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1.4.4 3D Microcontroller Stacks with Embedded SRAM and EEPROM |
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17 | (1) |
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1.4.5 NAND Flash Memory as an Ideal 3D Memory |
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17 | (3) |
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1.5 3D Cross-Point Arrays with Resistance RAM |
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20 | (1) |
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1.6 STT-MTJ Resistance Switches in 3D |
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21 | (1) |
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1.7 The Role of Emerging Memories in 3D Vertical Memories |
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22 | (1) |
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23 | (2) |
2 3D Memory Using Double-Gate, Folded, TFT, and Stacked Crystal Silicon |
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25 | (47) |
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25 | (1) |
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2.2 FinFETEarly Vertical Memories |
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26 | (11) |
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2.2.1 Early FD-SOI FinFET Charge-Trapping Flash Memory |
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26 | (2) |
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2.2.2 FinFET Charge-Trapping Memory on Bulk Silicon |
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28 | (4) |
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2.2.3 Doubling Memory Density Using a Paired FinFET Bit-Line Structure |
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32 | (2) |
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2.2.4 Other Folded Gate Memory Structures and Characteristics |
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34 | (3) |
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2.3 Double-Gate and Tri-Gate Flash |
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37 | (6) |
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2.3.1 Vertical Channel Double Floating Gate Flash Memory |
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37 | (1) |
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2.3.2 Early Double- and Tri-Gate FinFET Charge-Trapping Flash Memories |
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38 | (1) |
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2.3.3 Double-Gate Dopant-Segregated Schottky Barrier CT FinFET Flash |
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39 | (3) |
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2.3.4 Independent Double-Gate FinFET CT Flash Memory |
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42 | (1) |
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2.4 Thin-Film Transistor (TFT) Nonvolatile Memory with Polysilicon Channels |
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43 | (6) |
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2.4.1 Independent Double-Gate Memory with TFT and Polysilicon Channels |
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43 | (3) |
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2.4.2 TFT Polysilicon Channel NV Memory Using Silicon Protrusions to Enhance Performance |
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46 | (1) |
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2.4.3 An Improved Polysilicon Channel TFT for Vertical Transistor NAND Flash |
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46 | (1) |
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2.4.4 Polysilicon TFT CT Memory with Vacuum Tunneling and Al2O3 Blocking Oxide |
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47 | (1) |
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2.4.5 Graphene Channel NV Memory with Al2O3HfOxAl2O3 Storage Layer |
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48 | (1) |
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2.5 Double-Gate Vertical Channel Flash Memory with Engineered Tunnel Layer |
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49 | (6) |
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2.5.1 Double-Gate Vertical Single-Crystal Silicon Channel with Engineered Tunnel Layer |
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49 | (2) |
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2.5.2 Polysilicon Substrate TFT CT NAND with Engineered Tunnel Layer |
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51 | (1) |
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2.5.3 Polysilicon Channel Double-Layer Stacked TFT NAND Bandgap-Engineered Flash |
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52 | (2) |
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2.5.4 Eight-Layer 3D Vertical DG TFT NAND Flash with Junctionless Buried Channel |
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54 | (1) |
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2.5.5 Variability in Polysilicon TFT for 3D Vertical Gate NAND Flash |
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55 | (1) |
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2.6 Stacked Gated Twin-Bit (SGTB) CT Flash |
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55 | (1) |
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2.7 Crystalline Silicon and Epitaxial Stacked Layers |
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56 | (13) |
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2.7.1 Stacked Crystalline Silicon Layer TFT for Six-Transistor SRAM Cell Technology |
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57 | (4) |
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2.7.2 Stacked Silicon Layer S3 Process for Production SRAM |
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61 | (3) |
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2.7.3 NAND Flash Memory Development Using Double-Stacked 53 Technology |
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64 | (2) |
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2.7.4 4Gb NAND Flash Memory in 45 nm 3D Double-Stacked S3 Technology |
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66 | (3) |
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69 | (3) |
3 Gate-All-Around (GAA) Nanowire for Vertical Memory |
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72 | (47) |
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3.1 Overview of GAA Nanowire Memories |
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72 | (1) |
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3.2 Single-Crystal Silicon GAA Nanowire CT Memories |
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72 | (10) |
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3.2.1 Overview of Single-Crystal Silicon GAA CT Memories |
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72 | (1) |
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3.2.2 An Early GAA Nanowire Single-Crystal Silicon CT Memory |
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73 | (1) |
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3.2.3 Vertically Stacked Single-Crystal Silicon Twin Nanowire GAA CT Memories |
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74 | (1) |
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3.2.4 GAA CT NAND Flash String Using One Single-Crystal SiNW |
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75 | (2) |
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3.2.5 Single-Crystal SiNW CT Memory with High-K Dielectric and Metal Gate |
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77 | (1) |
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3.2.6 Improvement in Transient Vth Shift After Erase in 3D GM NW SONOS |
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78 | (1) |
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3.2.7 Semianalytical Model of GAA CT Memories |
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79 | (1) |
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3.2.8 Nonvolatile GM Single-Crystal Silicon Nanowire Memory on Bulk Substrate |
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79 | (3) |
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3.3 Polysilicon GAA Nanowire CT Memories |
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82 | (6) |
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3.3.1 Polysilicon CT Memories with NW Diameter Comparable to Polysilicon Grain Size |
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82 | (1) |
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3.3.2 Various GM Polysilicon NW Memory Con, figurations |
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83 | (2) |
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3.3.3 Trapping Layer Enhanced Polysilicon NW SONOS |
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85 | (3) |
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3.4 Junctionless GAA CT Nanowire Memories |
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88 | (7) |
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3.4.1 3D Junctionless Vertical GAA Silicon NW SONOS Memories |
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88 | (3) |
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3.4.2 functionless GM SONOS Silicon Nanowire on Bulk Substrate for 3D NAND Stack |
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91 | (1) |
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3.4.3 Modeling Erase in Cylindrical functionless CT Arrays |
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92 | (3) |
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3.4.4 Hf02Si3N4 Trap Layer in functionless Polycrystal GM Memory Storage |
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95 | (1) |
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3.5 3D Stacked Horizontal Nanowire Single-Crystal Silicon Memory |
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95 | (8) |
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3.5.1 Process for 3D Stacked Horizontal NW Single-Crystal Silicon Memory |
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96 | (2) |
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3.5.2 A Stacked Horizontal NW Single-Crystal Silicon NAND Flash Memory Development |
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98 | (5) |
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3.6 Vertical Single-Crystal GAA CT Nanowire Flash Technology |
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103 | (4) |
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3.6.1 Overview of Vertical Flash Using GM SONOS Nanowire Technology |
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103 | (1) |
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3.6.2 Vertical Single-Crystal Silicon 3D Flash Using GM SONOS Nanowire |
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103 | (1) |
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3.6.3 Fabrication of Two Independent GM FETs on a Vertical SiNW |
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104 | (2) |
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3.6.4 Vertical 3D Silicon Nanowire CT NAND Array |
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106 | (1) |
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3.7 Vertical Channel Polysilicon GAA CT Memory |
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107 | (8) |
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3.7.1 Multiple Vertical GAA Flash Cells Stacked Using Polysilicon NW Channel |
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107 | (2) |
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3.7.2 Vth Shift Characteristics of Vertical GM SONOS and/or TANOS Nonvolatile Memory |
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109 | (2) |
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3.7.3 GM Vertical Pipe CT Gate Replacement Technology |
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111 | (1) |
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3.7.4 Bilayer Poly Channel Vertical Flash for 3D SONOS NAND |
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112 | (1) |
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3.7.5 3D Vertical Pipe CT Low-Resistance (CoSi) Word-Line NAND Flash |
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112 | (2) |
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3.7.6 Vertical Channel CT 3D NAND Flash Cell |
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114 | (1) |
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3.7.7 Read Sensing for Thin-Body Vertical NAND |
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114 | (1) |
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3.8 Graphene Channel Nonvolatile Memory with A1203Hf0--A1203 Storage Layer |
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115 | (1) |
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3.9 Cost Analysis for 3D GAA NAND Flash Considering Channel Slope |
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116 | (1) |
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117 | (2) |
4 Vertical NAND Flash |
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119 | (73) |
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4.1 Overview of 3D Vertical NAND Trends |
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119 | (5) |
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4.1.1 3D Nonvolatile Memory Overview |
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119 | (1) |
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4.1.2 Architectures of Various 3D NAND Flash Arrays |
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120 | (2) |
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4.1.3 Scaling Trends for 2D and 3D NAND Cells |
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122 | (2) |
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4.2 Vertical Channel (Pipe) CT NAND Flash Technology |
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124 | (22) |
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4.2.1 BiCS CT Pipe NAND Flash Technology |
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124 | (4) |
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4.2.2 Pipe-Shaped BiCS (P-BiCS) NAND Flash Technology |
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128 | (10) |
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4.2.3 Vertical CT Vertical Recess Array Transistor (VRAT) Technology |
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138 | (1) |
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4.2.4 Z-VRAT CT Memory Technology |
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139 | (2) |
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4.2.5 Vertical NAND ChainsVSAT with "PIPE" Process |
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141 | (1) |
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4.2.6 Vertical CT PIPE NAND Flash with Damascene Metal Gate TCAT/VNAND |
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142 | (3) |
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4.2.7 3D NAND Flash SB-CAT Stack |
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145 | (1) |
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4.3 3D FG NAND Flash Cell Arrays |
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146 | (13) |
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4.3.1 3D FG NAND with Extended Sidewall Control Gate |
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146 | (3) |
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4.3.2 3D FG NAND with Separated-Sidewall Control Gate |
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149 | (3) |
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4.3.3 3D FG NAND Flash Cell with Dual CGs and Surrounding FG (DC-SF) |
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152 | (3) |
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4.3.4 3D Vertical FG NAND with Sidewall Control Pillar |
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155 | (2) |
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4.3.5 Trap Characterization in 3D Vertical Channel NAND Flash |
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157 | (1) |
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4.3.6 Program Disturb Characteristics of 3D Vertical NAND Flash |
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158 | (1) |
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4.4 3D Stacked NAND Flash with Lateral BL Layers and Vertical Gate |
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159 | (30) |
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4.4.1 Introduction to Horizontal BL and Vertical Gate NAND Flash |
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159 | (1) |
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4.4.2 A 3D Vertical Gate NAND Flash Process and Device Considerations |
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160 | (3) |
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4.4.3 Vertical Gate NAND Flash Integration with Eight Active Layers |
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163 | (2) |
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4.4.4 3D Stacked CT TFT Bandgap-Engineered SONOS NAND Flash Memory |
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165 | (3) |
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4.4.5 Horizontal Channel Vertical Gate 3D NAND Flash with PN Diode Decoding |
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168 | (1) |
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4.4.6 3D Vertical Gate BE-SONOS NAND Program Inhibit with Multiple Island Gate Decoding |
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169 | (2) |
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4.4.7 3D Vertical Gate NAND Flash BL Decoding and Page Operation |
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171 | (2) |
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4.4.8 An Eight-Layer Vertical Gate 3D NAND Architecture with Split-Page BL |
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173 | (3) |
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4.4.9 Various Innovations for 3D Stackable Vertical Gate |
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176 | (4) |
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4.4.10 Variability Considerations in 2D Vertical Gate 3D NAND Flash |
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180 | (2) |
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4.4.11 An Etching Technology for Vertical Multilayers for 3D Vertical Gate NAND Flash |
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182 | (1) |
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4.4.12 Interference, Disturb, and Programming Algorithms for MLC Vertical Gate NAND |
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183 | (1) |
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4.4.13 3D Vertical Gate NAND Flash Program and Read and Fail-Bit Detection |
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184 | (1) |
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4.4.14 3D p-Channel Stackable NAND Flash with Band-to-Band Tunnel Programming |
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185 | (2) |
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4.4.15 A Bit-Alterable 3D NAND Flash with n-Channel and p-Channel NAND |
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187 | (2) |
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189 | (3) |
5 3D Cross-Point Array Memory |
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192 | (83) |
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5.1 Overview of Cross-Point Array Memory |
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192 | (1) |
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5.2 A Brief Background of Cross-Point Array Memories |
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193 | (10) |
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5.2.1 Construction of a Basic Cross-Point Array |
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193 | (1) |
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5.2.2 Stacking Multibit Cross-Point Arrays |
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194 | (2) |
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5.2.3 Methods of Stacking Cross-Point Arrays |
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196 | (1) |
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5.2.4 Stacking Cross-Point Layers for High Density |
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197 | (1) |
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5.2.5 An Example of Unipolar ReRAM |
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198 | (1) |
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5.2.6 An Example of a Bipolar ReRAM |
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199 | (1) |
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5.2.7 Basic Cross-Point Array Operation with a Diode Selector |
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200 | (1) |
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5.2.8 Early Test Chip Using a ReRAM Cross-Point Array with Diode Selector |
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201 | (2) |
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5.3 Low-Resistance Interconnects for Cross-Point Arrays |
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203 | (4) |
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5.3.1 Model of Low Resistance Interconnects for Cross-Point Arrays |
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203 | (3) |
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5.3.2 A Cross-Point Array Grid with Low-Resistivity Nanowires |
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206 | (1) |
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5.3.3 A Cross-Point Array Using Two Nickel Core Nanowires |
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206 | (1) |
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5.3.4 Resistive Memory Using Single-Wall Carbon Nanotubes |
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207 | (1) |
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5.4 Cross-Point Array Memories Without Cell Selectors |
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207 | (10) |
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5.4.1 Early Model of Bipolar Resistive Switch in Selectorless Cross-Point Array |
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208 | (2) |
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5.4.2 Sneak Path Leakage in a Selectorless Cross-Point Array |
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210 | (2) |
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5.4.3 Effect of Parasitic Resistance on Maximum Size of a Selectorless Cross-Point Array |
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212 | (3) |
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5.4.4 Effect of Nonlinearity on IV Characteristics of Selectorless Memory Element |
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215 | (1) |
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5.4.5 Self-Rectifying ReRAM Requirements in Cross-Point Arrays |
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216 | (1) |
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5.4.6 A Cross-Point Array Model for Line Resistance and Nonlinear Devices |
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217 | (1) |
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5.5 Examples of Selectorless Cross-Point Arrays |
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217 | (10) |
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5.5.1 Example of Nonlinearity in a Selectorless Cross-Point Array |
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217 | (1) |
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5.5.2 Example of High-Resistive Memory Element in Selectorless Cross-Point Array |
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218 | (3) |
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5.5.3 Design Techniques for Nonlinear Selectorless Cross-Point Arrays Using ReRANIs |
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221 | (1) |
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5.5.4 Film Thickness and Scaling Effects in Cross-Point Selectorless ReRAM |
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222 | (1) |
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5.5.5 Vertical HfOx ReRAM 3D Cross-Point Array Without Cell Selector |
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223 | (1) |
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5.5.6 Dopant Selection Rules for Tuning HfOx ReRAM Characteristics |
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224 | (1) |
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5.5.7 High-Resistance CB-ReRAM Memory Element to Avoid Sneak Current |
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225 | (1) |
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5.5.8 Electromechanical Diode Cell for a Cross-Point Nonvolatile Memory Array |
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226 | (1) |
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5.6 Unipolar Resistance RAMS with Diode Selectors in Cross-Point Arrays |
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227 | (11) |
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5.6.1 Overview of Unipolar ReRAMS with Diode Selectors in Cross-Point Arrays |
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227 | (1) |
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5.6.2 A Unipolar ReRAM with Silicon Diode for Cross-Point Array |
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228 | (2) |
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5.6.3 CuOxInZnOx Heterojunction Thin-Film Diode with NiO ReRAM |
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230 | (2) |
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5.6.4 Unipolar NiO ReRAM reset and SETRESET Instability |
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232 | (1) |
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5.6.5 HfOxAlOy Unipolar ReRAM with Silicon Diode Selector in Cross-Point Array |
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232 | (2) |
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5.6.6 TiNTaOxPt MIM Selector for PtTaOxPt Unipolar ReRAM Cross-Point Array |
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234 | (1) |
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5.6.7 Self-Rectifying Unipolar NiHfOx Schottky Barrier ReRAM |
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234 | (2) |
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5.6.8 Schottky Barriers for Self-Rectifying Unidirectional Cross-Point Array |
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236 | (1) |
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5.6.9 Thermally Induced Set Operation for Unipolar ReRAM with Diode Selector |
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237 | (1) |
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5.7 Unipolar PCM with Two-Terminal Diodes for Cross-Point Array |
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238 | (8) |
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5.7.1 Background of Phase-Change Memory in a Cross-Point Array |
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238 | (1) |
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5.7.2 PCMs in Cross-Point Arrays with Polysilicon Diodes |
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239 | (1) |
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5.7.3 Cross-Point Array with PCM and Carbon Nanotube Electrode |
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240 | (1) |
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5.7.4 Cross-Point Array with MIEC Access Devices and PCM Elements |
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241 | (2) |
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5.7.5 Threshold Switching Access Devices for ReRAM Cross-Point Arrays |
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243 | (1) |
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5.7.6 pn Diode Selection Devices for PCM |
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244 | (1) |
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5.7.7 Epitaxial Diode Selector for PCM in Cross-Point Arrays |
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245 | (1) |
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5.7.8 Dual-Trench Epitaxial Diode Array for High-Density PCM |
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245 | (1) |
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5.8 Bipolar Resistance RAMS With Selector Devices in Cross-Point Arrays |
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246 | (10) |
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5.8.1 VO2 Select Device for Bipolar ReRAM in Cross-Point Array |
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246 | (1) |
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5.8.2 Threshold Select Devices for Bipolar Memory Elements in Cross-Point Arrays |
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246 | (3) |
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5.8.3 Vertical Bipolar Switching Polysilicon npn Diode for Cross-Point Array |
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249 | (1) |
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5.8.4 Two-Terminal Diode Steering Element for 3D Cross-Point ReRAM Array |
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250 | (1) |
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5.8.5 Varistor-Type Bidirectional Switch for 3D Bipolar ReRAM Array |
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250 | (1) |
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5.8.6 Bidirectional Threshold Vacuum Switch for 3D 4F2 Cross-Point Array |
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251 | (1) |
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5.8.7 Bidirectional Schottky Diode Selector |
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252 | (2) |
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5.8.8 Bipolar ReRAM with Schottky Self-Rectifying Behavior in the LRS |
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254 | (1) |
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5.8.9 Self-Rectifying Bipolar ReRAM Using Schottky Barrier at TaTaOx Interface |
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255 | (1) |
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5.8.10 Diode Effect of PtIn2Ga2ZnO2 Layer in TiO2-type ReRAM |
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255 | (1) |
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5.8.11 Confined NbO2 as a Selector in Bipolar ReRAMs |
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256 | (1) |
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5.9 Complementary Switching Devices and Arrays |
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256 | (11) |
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5.9.1 Complementary Resistive Switching for Dense Crossbar Arrays |
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256 | (1) |
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5.9.2 CRS Memory Using Amorphous Carbon and CNTs |
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257 | (2) |
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5.9.3 Complementary Switching in Metal-Oxide ReRAM for Crossbar Arrays |
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259 | (1) |
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5.9.4 CRSs Using a Heterodevice |
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260 | (1) |
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5.9.5 Self-Selective W-VO2-Pt ReRAM to Reduce Sneak Current in ReRAM Arrays |
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261 | (2) |
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5.9.6 Hybrid Nb2O5-NbO2ReRAM with Combined Memory and Selector |
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263 | (1) |
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5.9.7 Analysis of Complementary ReRAM Switching |
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264 | (2) |
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5.9.8 Complementary Stacked Bipolar ReRAM Cross-Point Arrays |
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266 | (1) |
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5.9.9 Complementary Switching Oxide-Based Bipolar ReRAM |
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266 | (1) |
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5.10 Toward Manufacturable ReRAM Cells and Cross-ppint Arrays |
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267 | (2) |
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5.10.1 28 nm ReRAM and Diode Cross-Point Array in CMOS-Compatible Process |
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267 | (1) |
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5.10.2 Double-Layer 3D Vertical ReRAM for High-Density Arrays |
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268 | (1) |
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5.10.3 Study of Cell Performance for Different Stacked ReRAM Geometries |
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269 | (1) |
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5.11 STT Magnetic Tunnel Junction Resistance Switches in Cross-Point Array Architecture |
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269 | (2) |
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5.11.1 High-Density Cross-Point STT Magnetic Tunnel Junction Architecture |
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269 | (2) |
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271 | (4) |
6 3D Stacking of RAM-Processor Chips Using TSV |
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275 | (70) |
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6.1 Overview of 3D Stacking of RAM-Processor Chips with TSV |
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275 | (5) |
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6.2 Architecture and Design of TSV RAM-Processor Chips |
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280 | (12) |
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6.2.1 Overview of Architecture and Design of Vertical TSV Connected Chips |
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280 | (1) |
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6.2.2 Repartitioning For Performance by Increasing the Number of Memory Banks |
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280 | (2) |
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6.2.3 Using a Global Clock Distribution Technique to Improve Performance |
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282 | (1) |
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6.2.4 Stacking eDRAM Cache and Processor for Improved Performance |
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282 | (1) |
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6.2.5 Using Decoupling Scheduling of the Memory Controller to Improve Performance |
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283 | (1) |
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6.2.6 Repartitioning Multicore Processors and Stacked RAM for Improved Performance |
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283 | (4) |
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6.2.7 Increasing Performance and Lowering Power in Low-Power Mobile Systems |
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287 | (1) |
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6.2.8 Increasing Performance of Memory Hierarchies with 3D TSV Integration |
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287 | (2) |
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6.2.9 Adding Storage-Class Memory to the Memory Hierarchy |
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289 | (1) |
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6.2.10 Improving Performance Using 3D Stacked RAM Modeling |
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290 | (2) |
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6.3 Process and Fabrication of Vertical TSV for Memory and Logic |
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|
292 | (7) |
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6.3.1 Passive TSV Interposers for Stacked Memory-Logic Integration |
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|
292 | (3) |
|
6.3.2 Process Fabrication Methods and Foundries four Early 2.5D and 3D Integration |
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|
295 | (1) |
|
6.3.3 Integration with TSV Using a High-xMetal Gate CMOS Process |
|
|
296 | (1) |
|
6.3.4 Processor with Deep Trench DRAM TSV Stacks and High-xMetal Gate |
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|
297 | (2) |
|
6.4 Process and Fabrication Issues of TSV 3D Stacking Technology |
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|
299 | (2) |
|
6.4.1 Using Copper TSV for 3D Stacking |
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|
299 | (1) |
|
6.4.2 Air Gaps for High-Performance TSV Interconnects for 3D ICs |
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|
300 | (1) |
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|
301 | (5) |
|
6.5.1 Using TSVs at Various Stages in the Process |
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|
301 | (2) |
|
6.5.2 Stacked Chips using Via-Middle Technology |
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|
303 | (3) |
|
6.6 Energy Efficiency Considerations of 3D Stacked MemoryLogic Chip Systems |
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|
306 | (8) |
|
6.6.1 Overview of Energy Efficiency in 3D Stacked MemoryLogic Chip Systems |
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|
306 | (1) |
|
6.6.2 Energy Efficiency for a 3D TSV Integrated DRAMController System |
|
|
306 | (2) |
|
6.6.3 Adding an SRAM Row Cache to Stacked 3D DRAM to Minimize Energy |
|
|
308 | (3) |
|
6.6.4 Power Delivery Networks in 3D ICs |
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|
311 | (1) |
|
6.6.5 Using Near-Threshold Computing for Power Reduction in a 3D TSV System |
|
|
312 | (2) |
|
6.7 Thermal Characterization Analysis and Modeling of RAMLogic Stacks |
|
|
314 | (2) |
|
6.7.1 Thermal Management of Hot Spots in 3D Chips |
|
|
314 | (1) |
|
6.7.2 Thermal Management in 3D Chips Using an Interposer with Embedded TSV |
|
|
314 | (1) |
|
6.7.3 Thermal Management of TSV DRAM Stacks with Logic |
|
|
314 | (2) |
|
6.7.4 Thermal Management of a 3D TSV SRAM on Logic Stack |
|
|
316 | (1) |
|
6.8 Testing of 3D Stacked TSV System Chips |
|
|
316 | (4) |
|
6.8.1 Using BIST to Reduce Testing for a Logic and DRAM System Stack |
|
|
316 | (1) |
|
6.8.2 Efficient BISR and Redundancy Allocation in 3D RAMLogic Stacks |
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|
316 | (3) |
|
6.8.3 Direct Testing of Early SDRAM Stacks |
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|
319 | (1) |
|
6.9 Reliability Considerations with 3D TSV RAMProcessor Chips |
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|
320 | (6) |
|
6.9.1 Overview of Reliability Issues in 3D TSV Stacked RAMProcessor Chips |
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|
320 | (1) |
|
6.9.2 Variation Issues in Stacked 3D TSV RAMProcessor Chips |
|
|
320 | (1) |
|
6.9.3 Switching and Decoupling Noise in a 3D TSV-Based System |
|
|
321 | (3) |
|
6.9.4 TSV-Induced Mechanical Stress in CMOS |
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|
324 | (2) |
|
6.10 Reconfiguring Stacked TSV Memory Architectures for Improved Performance |
|
|
326 | (7) |
|
6.10.1 Overview of Potential for Reconfigured Stacked Architectures |
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|
326 | (1) |
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6.10.2 3D TSV-based 3D SRAM for High-Performance Platforms |
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|
326 | (3) |
|
6.10.3 Waveform Capture with 100 GB/s I/O, 4096 TSVs and an Active Si Interposer |
|
|
329 | (1) |
|
6.10.4 3D Stacked FPGA and ReRAM Configuration Memory |
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|
330 | (1) |
|
6.10.5 Cache Architecture to Configure Stacked DRAM to Specific Applications |
|
|
330 | (1) |
|
6.10.6 Network Platform for Stacked MemoryProcessor Architectures |
|
|
331 | (1) |
|
6.10.7 Multiplexing Signals to Reduce Number of TSVs in IC Die Stacking |
|
|
332 | (1) |
|
6.10.8 3D Hybrid Cache with MRAM and SRAM Stacked on Processor Cores |
|
|
333 | (1) |
|
6.10.9 CMOS FPGA and Routing Switches Made with ReRAM Devices |
|
|
333 | (1) |
|
6.10.10 Dynamic Configurable SRAM Stacked with Various Logic Chips |
|
|
333 | (1) |
|
6.11 Stacking Memories Using Noncontact Connections with Inductive Coupling |
|
|
333 | (7) |
|
6.11.1 Overview of Noncontact Inductive Coupling of Stacked Memory |
|
|
333 | (1) |
|
6.11.2 Early Concepts of Inductive-Coupling Connections of Stacked Memory Chips |
|
|
334 | (2) |
|
6.11.3 Evolution of Inductive-Coupling Connections of NAND Flash Stacks |
|
|
336 | (2) |
|
6.11.4 TCI for Replacing Stacking with TSV Connections |
|
|
338 | (1) |
|
6.11.5 ProcessorSRAM 3D Integration Using Inductive Coupling |
|
|
339 | (1) |
|
6.11.6 Optical Interface for Future 3D Stacked Chip Connections |
|
|
339 | (1) |
|
|
340 | (5) |
Index |
|
345 | |