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E-grāmata: Vertical 3D Memory Technologies [Wiley Online]

(Motorola Inc., UK)
  • Formāts: 368 pages
  • Izdošanas datums: 26-Sep-2014
  • Izdevniecība: John Wiley & Sons Inc
  • ISBN-10: 1118760476
  • ISBN-13: 9781118760475
  • Wiley Online
  • Cena: 136,48 €*
  • * this price gives unlimited concurrent access for unlimited time
  • Formāts: 368 pages
  • Izdošanas datums: 26-Sep-2014
  • Izdevniecība: John Wiley & Sons Inc
  • ISBN-10: 1118760476
  • ISBN-13: 9781118760475
By integrating individual systems chips into tightly linked vertical stacks, the performance of many technologies that we have come to rely on can increase with a reduction in cost and power. While technology is trending in this direction, the field is still open. This book aims to summarize the current research for electronics industry engineers, professionals and students in hopes of encouraging development of 3D vertical memory chips. Specific technologies that are explored include gate-all-around junctionless nanowire memories, stacked thin-film and double gate memories, and 3D stacking of memory and processor chips. The extensive use of graphs and figures helps to illustrate complex topics. Annotation ©2015 Ringgold, Inc., Portland, OR (protoview.com)

The large scale integration and planar scaling of individual system chips is reaching an expensive limit. If individual chips now, and later terrabyte memory blocks, memory macros, and processing cores, can be tightly linked in optimally designed and processed small footprint vertical stacks, then performance can be increased, power reduced and cost contained. This book reviews for the electronics industry engineer, professional and student the critical areas of development for 3D vertical memory chips including: gate-all-around and junction-less nanowire memories, stacked thin film and double gate memories, terrabit vertical channel and vertical gate stacked NAND flash, large scale stacking of Resistance RAM cross-point arrays, and 2.5D/3D stacking of memory and processor chips with through-silicon-via connections now and remote links later.

Key features:

  • Presents a review of the status and trends in 3-dimensional vertical memory chip technologies.
  • Extensively reviews advanced vertical memory chip technology and development
  • Explores technology process routes and 3D chip integration in a single reference
Acknowledgments xv
1 Basic Memory Device Trends Toward the Vertical 1(24)
1.1 Overview of 3D Vertical Memory Book
1(1)
1.2 Moore's Law and Scaling
2(1)
1.3 Early RAM 3D Memory
3(10)
1.3.1 SRAM as the First 3D Memory
3(3)
1.3.2 An Early 3D Memory—The FinFET SRAM
6(1)
1.3.3 Early Progress in 3D DRAM Trench and Stack Capacitors
6(5)
1.3.4 3D as the Next Step for Embedded RAM
11(2)
1.4 Early Nonvolatile Memories Evolve to 3D
13(7)
1.4.1 NOR Flash Memory—Both Standalone and Embedded
13(1)
1.4.2 The Charge-Trapping EEPROM
14(1)
1.4.3 Thin-Film Transistor Takes Nonvolatile Memory into 3D
15(2)
1.4.4 3D Microcontroller Stacks with Embedded SRAM and EEPROM
17(1)
1.4.5 NAND Flash Memory as an Ideal 3D Memory
17(3)
1.5 3D Cross-Point Arrays with Resistance RAM
20(1)
1.6 STT-MTJ Resistance Switches in 3D
21(1)
1.7 The Role of Emerging Memories in 3D Vertical Memories
22(1)
References
23(2)
2 3D Memory Using Double-Gate, Folded, TFT, and Stacked Crystal Silicon 25(47)
2.1 Introduction
25(1)
2.2 FinFET—Early Vertical Memories
26(11)
2.2.1 Early FD-SOI FinFET Charge-Trapping Flash Memory
26(2)
2.2.2 FinFET Charge-Trapping Memory on Bulk Silicon
28(4)
2.2.3 Doubling Memory Density Using a Paired FinFET Bit-Line Structure
32(2)
2.2.4 Other Folded Gate Memory Structures and Characteristics
34(3)
2.3 Double-Gate and Tri-Gate Flash
37(6)
2.3.1 Vertical Channel Double Floating Gate Flash Memory
37(1)
2.3.2 Early Double- and Tri-Gate FinFET Charge-Trapping Flash Memories
38(1)
2.3.3 Double-Gate Dopant-Segregated Schottky Barrier CT FinFET Flash
39(3)
2.3.4 Independent Double-Gate FinFET CT Flash Memory
42(1)
2.4 Thin-Film Transistor (TFT) Nonvolatile Memory with Polysilicon Channels
43(6)
2.4.1 Independent Double-Gate Memory with TFT and Polysilicon Channels
43(3)
2.4.2 TFT Polysilicon Channel NV Memory Using Silicon Protrusions to Enhance Performance
46(1)
2.4.3 An Improved Polysilicon Channel TFT for Vertical Transistor NAND Flash
46(1)
2.4.4 Polysilicon TFT CT Memory with Vacuum Tunneling and Al2O3 Blocking Oxide
47(1)
2.4.5 Graphene Channel NV Memory with Al2O3—HfOx—Al2O3 Storage Layer
48(1)
2.5 Double-Gate Vertical Channel Flash Memory with Engineered Tunnel Layer
49(6)
2.5.1 Double-Gate Vertical Single-Crystal Silicon Channel with Engineered Tunnel Layer
49(2)
2.5.2 Polysilicon Substrate TFT CT NAND with Engineered Tunnel Layer
51(1)
2.5.3 Polysilicon Channel Double-Layer Stacked TFT NAND Bandgap-Engineered Flash
52(2)
2.5.4 Eight-Layer 3D Vertical DG TFT NAND Flash with Junctionless Buried Channel
54(1)
2.5.5 Variability in Polysilicon TFT for 3D Vertical Gate NAND Flash
55(1)
2.6 Stacked Gated Twin-Bit (SGTB) CT Flash
55(1)
2.7 Crystalline Silicon and Epitaxial Stacked Layers
56(13)
2.7.1 Stacked Crystalline Silicon Layer TFT for Six-Transistor SRAM Cell Technology
57(4)
2.7.2 Stacked Silicon Layer S3 Process for Production SRAM
61(3)
2.7.3 NAND Flash Memory Development Using Double-Stacked 53 Technology
64(2)
2.7.4 4Gb NAND Flash Memory in 45 nm 3D Double-Stacked S3 Technology
66(3)
References
69(3)
3 Gate-All-Around (GAA) Nanowire for Vertical Memory 72(47)
3.1 Overview of GAA Nanowire Memories
72(1)
3.2 Single-Crystal Silicon GAA Nanowire CT Memories
72(10)
3.2.1 Overview of Single-Crystal Silicon GAA CT Memories
72(1)
3.2.2 An Early GAA Nanowire Single-Crystal Silicon CT Memory
73(1)
3.2.3 Vertically Stacked Single-Crystal Silicon Twin Nanowire GAA CT Memories
74(1)
3.2.4 GAA CT NAND Flash String Using One Single-Crystal SiNW
75(2)
3.2.5 Single-Crystal SiNW CT Memory with High-K Dielectric and Metal Gate
77(1)
3.2.6 Improvement in Transient Vth Shift After Erase in 3D GM NW SONOS
78(1)
3.2.7 Semianalytical Model of GAA CT Memories
79(1)
3.2.8 Nonvolatile GM Single-Crystal Silicon Nanowire Memory on Bulk Substrate
79(3)
3.3 Polysilicon GAA Nanowire CT Memories
82(6)
3.3.1 Polysilicon CT Memories with NW Diameter Comparable to Polysilicon Grain Size
82(1)
3.3.2 Various GM Polysilicon NW Memory Con, figurations
83(2)
3.3.3 Trapping Layer Enhanced Polysilicon NW SONOS
85(3)
3.4 Junctionless GAA CT Nanowire Memories
88(7)
3.4.1 3D Junctionless Vertical GAA Silicon NW SONOS Memories
88(3)
3.4.2 functionless GM SONOS Silicon Nanowire on Bulk Substrate for 3D NAND Stack
91(1)
3.4.3 Modeling Erase in Cylindrical functionless CT Arrays
92(3)
3.4.4 Hf02—Si3N4 Trap Layer in functionless Polycrystal GM Memory Storage
95(1)
3.5 3D Stacked Horizontal Nanowire Single-Crystal Silicon Memory
95(8)
3.5.1 Process for 3D Stacked Horizontal NW Single-Crystal Silicon Memory
96(2)
3.5.2 A Stacked Horizontal NW Single-Crystal Silicon NAND Flash Memory Development
98(5)
3.6 Vertical Single-Crystal GAA CT Nanowire Flash Technology
103(4)
3.6.1 Overview of Vertical Flash Using GM SONOS Nanowire Technology
103(1)
3.6.2 Vertical Single-Crystal Silicon 3D Flash Using GM SONOS Nanowire
103(1)
3.6.3 Fabrication of Two Independent GM FETs on a Vertical SiNW
104(2)
3.6.4 Vertical 3D Silicon Nanowire CT NAND Array
106(1)
3.7 Vertical Channel Polysilicon GAA CT Memory
107(8)
3.7.1 Multiple Vertical GAA Flash Cells Stacked Using Polysilicon NW Channel
107(2)
3.7.2 Vth Shift Characteristics of Vertical GM SONOS and/or TANOS Nonvolatile Memory
109(2)
3.7.3 GM Vertical Pipe CT Gate Replacement Technology
111(1)
3.7.4 Bilayer Poly Channel Vertical Flash for 3D SONOS NAND
112(1)
3.7.5 3D Vertical Pipe CT Low-Resistance (CoSi) Word-Line NAND Flash
112(2)
3.7.6 Vertical Channel CT 3D NAND Flash Cell
114(1)
3.7.7 Read Sensing for Thin-Body Vertical NAND
114(1)
3.8 Graphene Channel Nonvolatile Memory with A1203—Hf0„--A1203 Storage Layer
115(1)
3.9 Cost Analysis for 3D GAA NAND Flash Considering Channel Slope
116(1)
References
117(2)
4 Vertical NAND Flash 119(73)
4.1 Overview of 3D Vertical NAND Trends
119(5)
4.1.1 3D Nonvolatile Memory Overview
119(1)
4.1.2 Architectures of Various 3D NAND Flash Arrays
120(2)
4.1.3 Scaling Trends for 2D and 3D NAND Cells
122(2)
4.2 Vertical Channel (Pipe) CT NAND Flash Technology
124(22)
4.2.1 BiCS CT Pipe NAND Flash Technology
124(4)
4.2.2 Pipe-Shaped BiCS (P-BiCS) NAND Flash Technology
128(10)
4.2.3 Vertical CT Vertical Recess Array Transistor (VRAT) Technology
138(1)
4.2.4 Z-VRAT CT Memory Technology
139(2)
4.2.5 Vertical NAND Chains—VSAT with "PIPE" Process
141(1)
4.2.6 Vertical CT PIPE NAND Flash with Damascene Metal Gate TCAT/VNAND
142(3)
4.2.7 3D NAND Flash SB-CAT Stack
145(1)
4.3 3D FG NAND Flash Cell Arrays
146(13)
4.3.1 3D FG NAND with Extended Sidewall Control Gate
146(3)
4.3.2 3D FG NAND with Separated-Sidewall Control Gate
149(3)
4.3.3 3D FG NAND Flash Cell with Dual CGs and Surrounding FG (DC-SF)
152(3)
4.3.4 3D Vertical FG NAND with Sidewall Control Pillar
155(2)
4.3.5 Trap Characterization in 3D Vertical Channel NAND Flash
157(1)
4.3.6 Program Disturb Characteristics of 3D Vertical NAND Flash
158(1)
4.4 3D Stacked NAND Flash with Lateral BL Layers and Vertical Gate
159(30)
4.4.1 Introduction to Horizontal BL and Vertical Gate NAND Flash
159(1)
4.4.2 A 3D Vertical Gate NAND Flash Process and Device Considerations
160(3)
4.4.3 Vertical Gate NAND Flash Integration with Eight Active Layers
163(2)
4.4.4 3D Stacked CT TFT Bandgap-Engineered SONOS NAND Flash Memory
165(3)
4.4.5 Horizontal Channel Vertical Gate 3D NAND Flash with PN Diode Decoding
168(1)
4.4.6 3D Vertical Gate BE-SONOS NAND Program Inhibit with Multiple Island Gate Decoding
169(2)
4.4.7 3D Vertical Gate NAND Flash BL Decoding and Page Operation
171(2)
4.4.8 An Eight-Layer Vertical Gate 3D NAND Architecture with Split-Page BL
173(3)
4.4.9 Various Innovations for 3D Stackable Vertical Gate
176(4)
4.4.10 Variability Considerations in 2D Vertical Gate 3D NAND Flash
180(2)
4.4.11 An Etching Technology for Vertical Multilayers for 3D Vertical Gate NAND Flash
182(1)
4.4.12 Interference, Disturb, and Programming Algorithms for MLC Vertical Gate NAND
183(1)
4.4.13 3D Vertical Gate NAND Flash Program and Read and Fail-Bit Detection
184(1)
4.4.14 3D p-Channel Stackable NAND Flash with Band-to-Band Tunnel Programming
185(2)
4.4.15 A Bit-Alterable 3D NAND Flash with n-Channel and p-Channel NAND
187(2)
References
189(3)
5 3D Cross-Point Array Memory 192(83)
5.1 Overview of Cross-Point Array Memory
192(1)
5.2 A Brief Background of Cross-Point Array Memories
193(10)
5.2.1 Construction of a Basic Cross-Point Array
193(1)
5.2.2 Stacking Multibit Cross-Point Arrays
194(2)
5.2.3 Methods of Stacking Cross-Point Arrays
196(1)
5.2.4 Stacking Cross-Point Layers for High Density
197(1)
5.2.5 An Example of Unipolar ReRAM
198(1)
5.2.6 An Example of a Bipolar ReRAM
199(1)
5.2.7 Basic Cross-Point Array Operation with a Diode Selector
200(1)
5.2.8 Early Test Chip Using a ReRAM Cross-Point Array with Diode Selector
201(2)
5.3 Low-Resistance Interconnects for Cross-Point Arrays
203(4)
5.3.1 Model of Low Resistance Interconnects for Cross-Point Arrays
203(3)
5.3.2 A Cross-Point Array Grid with Low-Resistivity Nanowires
206(1)
5.3.3 A Cross-Point Array Using Two Nickel Core Nanowires
206(1)
5.3.4 Resistive Memory Using Single-Wall Carbon Nanotubes
207(1)
5.4 Cross-Point Array Memories Without Cell Selectors
207(10)
5.4.1 Early Model of Bipolar Resistive Switch in Selectorless Cross-Point Array
208(2)
5.4.2 Sneak Path Leakage in a Selectorless Cross-Point Array
210(2)
5.4.3 Effect of Parasitic Resistance on Maximum Size of a Selectorless Cross-Point Array
212(3)
5.4.4 Effect of Nonlinearity on I—V Characteristics of Selectorless Memory Element
215(1)
5.4.5 Self-Rectifying ReRAM Requirements in Cross-Point Arrays
216(1)
5.4.6 A Cross-Point Array Model for Line Resistance and Nonlinear Devices
217(1)
5.5 Examples of Selectorless Cross-Point Arrays
217(10)
5.5.1 Example of Nonlinearity in a Selectorless Cross-Point Array
217(1)
5.5.2 Example of High-Resistive Memory Element in Selectorless Cross-Point Array
218(3)
5.5.3 Design Techniques for Nonlinear Selectorless Cross-Point Arrays Using ReRANIs
221(1)
5.5.4 Film Thickness and Scaling Effects in Cross-Point Selectorless ReRAM
222(1)
5.5.5 Vertical HfOx ReRAM 3D Cross-Point Array Without Cell Selector
223(1)
5.5.6 Dopant Selection Rules for Tuning HfOx ReRAM Characteristics
224(1)
5.5.7 High-Resistance CB-ReRAM Memory Element to Avoid Sneak Current
225(1)
5.5.8 Electromechanical Diode Cell for a Cross-Point Nonvolatile Memory Array
226(1)
5.6 Unipolar Resistance RAMS with Diode Selectors in Cross-Point Arrays
227(11)
5.6.1 Overview of Unipolar ReRAMS with Diode Selectors in Cross-Point Arrays
227(1)
5.6.2 A Unipolar ReRAM with Silicon Diode for Cross-Point Array
228(2)
5.6.3 CuOx—InZnOx Heterojunction Thin-Film Diode with NiO ReRAM
230(2)
5.6.4 Unipolar NiO ReRAM reset and SET—RESET Instability
232(1)
5.6.5 HfOx—AlOy Unipolar ReRAM with Silicon Diode Selector in Cross-Point Array
232(2)
5.6.6 TiN—TaOx—Pt MIM Selector for Pt—TaOx—Pt Unipolar ReRAM Cross-Point Array
234(1)
5.6.7 Self-Rectifying Unipolar Ni—HfOx Schottky Barrier ReRAM
234(2)
5.6.8 Schottky Barriers for Self-Rectifying Unidirectional Cross-Point Array
236(1)
5.6.9 Thermally Induced Set Operation for Unipolar ReRAM with Diode Selector
237(1)
5.7 Unipolar PCM with Two-Terminal Diodes for Cross-Point Array
238(8)
5.7.1 Background of Phase-Change Memory in a Cross-Point Array
238(1)
5.7.2 PCMs in Cross-Point Arrays with Polysilicon Diodes
239(1)
5.7.3 Cross-Point Array with PCM and Carbon Nanotube Electrode
240(1)
5.7.4 Cross-Point Array with MIEC Access Devices and PCM Elements
241(2)
5.7.5 Threshold Switching Access Devices for ReRAM Cross-Point Arrays
243(1)
5.7.6 p—n Diode Selection Devices for PCM
244(1)
5.7.7 Epitaxial Diode Selector for PCM in Cross-Point Arrays
245(1)
5.7.8 Dual-Trench Epitaxial Diode Array for High-Density PCM
245(1)
5.8 Bipolar Resistance RAMS With Selector Devices in Cross-Point Arrays
246(10)
5.8.1 VO2 Select Device for Bipolar ReRAM in Cross-Point Array
246(1)
5.8.2 Threshold Select Devices for Bipolar Memory Elements in Cross-Point Arrays
246(3)
5.8.3 Vertical Bipolar Switching Polysilicon n—p—n Diode for Cross-Point Array
249(1)
5.8.4 Two-Terminal Diode Steering Element for 3D Cross-Point ReRAM Array
250(1)
5.8.5 Varistor-Type Bidirectional Switch for 3D Bipolar ReRAM Array
250(1)
5.8.6 Bidirectional Threshold Vacuum Switch for 3D 4F2 Cross-Point Array
251(1)
5.8.7 Bidirectional Schottky Diode Selector
252(2)
5.8.8 Bipolar ReRAM with Schottky Self-Rectifying Behavior in the LRS
254(1)
5.8.9 Self-Rectifying Bipolar ReRAM Using Schottky Barrier at Ta—TaOx Interface
255(1)
5.8.10 Diode Effect of Pt—In2Ga2ZnO2 Layer in TiO2-type ReRAM
255(1)
5.8.11 Confined NbO2 as a Selector in Bipolar ReRAMs
256(1)
5.9 Complementary Switching Devices and Arrays
256(11)
5.9.1 Complementary Resistive Switching for Dense Crossbar Arrays
256(1)
5.9.2 CRS Memory Using Amorphous Carbon and CNTs
257(2)
5.9.3 Complementary Switching in Metal-Oxide ReRAM for Crossbar Arrays
259(1)
5.9.4 CRSs Using a Heterodevice
260(1)
5.9.5 Self-Selective W-VO2-Pt ReRAM to Reduce Sneak Current in ReRAM Arrays
261(2)
5.9.6 Hybrid Nb2O5-NbO2ReRAM with Combined Memory and Selector
263(1)
5.9.7 Analysis of Complementary ReRAM Switching
264(2)
5.9.8 Complementary Stacked Bipolar ReRAM Cross-Point Arrays
266(1)
5.9.9 Complementary Switching Oxide-Based Bipolar ReRAM
266(1)
5.10 Toward Manufacturable ReRAM Cells and Cross-ppint Arrays
267(2)
5.10.1 28 nm ReRAM and Diode Cross-Point Array in CMOS-Compatible Process
267(1)
5.10.2 Double-Layer 3D Vertical ReRAM for High-Density Arrays
268(1)
5.10.3 Study of Cell Performance for Different Stacked ReRAM Geometries
269(1)
5.11 STT Magnetic Tunnel Junction Resistance Switches in Cross-Point Array Architecture
269(2)
5.11.1 High-Density Cross-Point STT Magnetic Tunnel Junction Architecture
269(2)
References
271(4)
6 3D Stacking of RAM-Processor Chips Using TSV 275(70)
6.1 Overview of 3D Stacking of RAM-Processor Chips with TSV
275(5)
6.2 Architecture and Design of TSV RAM-Processor Chips
280(12)
6.2.1 Overview of Architecture and Design of Vertical TSV Connected Chips
280(1)
6.2.2 Repartitioning For Performance by Increasing the Number of Memory Banks
280(2)
6.2.3 Using a Global Clock Distribution Technique to Improve Performance
282(1)
6.2.4 Stacking eDRAM Cache and Processor for Improved Performance
282(1)
6.2.5 Using Decoupling Scheduling of the Memory Controller to Improve Performance
283(1)
6.2.6 Repartitioning Multicore Processors and Stacked RAM for Improved Performance
283(4)
6.2.7 Increasing Performance and Lowering Power in Low-Power Mobile Systems
287(1)
6.2.8 Increasing Performance of Memory Hierarchies with 3D TSV Integration
287(2)
6.2.9 Adding Storage-Class Memory to the Memory Hierarchy
289(1)
6.2.10 Improving Performance Using 3D Stacked RAM Modeling
290(2)
6.3 Process and Fabrication of Vertical TSV for Memory and Logic
292(7)
6.3.1 Passive TSV Interposers for Stacked Memory-Logic Integration
292(3)
6.3.2 Process Fabrication Methods and Foundries four Early 2.5D and 3D Integration
295(1)
6.3.3 Integration with TSV Using a High-x—Metal Gate CMOS Process
296(1)
6.3.4 Processor with Deep Trench DRAM TSV Stacks and High-x—Metal Gate
297(2)
6.4 Process and Fabrication Issues of TSV 3D Stacking Technology
299(2)
6.4.1 Using Copper TSV for 3D Stacking
299(1)
6.4.2 Air Gaps for High-Performance TSV Interconnects for 3D ICs
300(1)
6.5 Fabrication of TSVs
301(5)
6.5.1 Using TSVs at Various Stages in the Process
301(2)
6.5.2 Stacked Chips using Via-Middle Technology
303(3)
6.6 Energy Efficiency Considerations of 3D Stacked Memory—Logic Chip Systems
306(8)
6.6.1 Overview of Energy Efficiency in 3D Stacked Memory—Logic Chip Systems
306(1)
6.6.2 Energy Efficiency for a 3D TSV Integrated DRAM—Controller System
306(2)
6.6.3 Adding an SRAM Row Cache to Stacked 3D DRAM to Minimize Energy
308(3)
6.6.4 Power Delivery Networks in 3D ICs
311(1)
6.6.5 Using Near-Threshold Computing for Power Reduction in a 3D TSV System
312(2)
6.7 Thermal Characterization Analysis and Modeling of RAM—Logic Stacks
314(2)
6.7.1 Thermal Management of Hot Spots in 3D Chips
314(1)
6.7.2 Thermal Management in 3D Chips Using an Interposer with Embedded TSV
314(1)
6.7.3 Thermal Management of TSV DRAM Stacks with Logic
314(2)
6.7.4 Thermal Management of a 3D TSV SRAM on Logic Stack
316(1)
6.8 Testing of 3D Stacked TSV System Chips
316(4)
6.8.1 Using BIST to Reduce Testing for a Logic and DRAM System Stack
316(1)
6.8.2 Efficient BISR and Redundancy Allocation in 3D RAM—Logic Stacks
316(3)
6.8.3 Direct Testing of Early SDRAM Stacks
319(1)
6.9 Reliability Considerations with 3D TSV RAM—Processor Chips
320(6)
6.9.1 Overview of Reliability Issues in 3D TSV Stacked RAM—Processor Chips
320(1)
6.9.2 Variation Issues in Stacked 3D TSV RAM—Processor Chips
320(1)
6.9.3 Switching and Decoupling Noise in a 3D TSV-Based System
321(3)
6.9.4 TSV-Induced Mechanical Stress in CMOS
324(2)
6.10 Reconfiguring Stacked TSV Memory Architectures for Improved Performance
326(7)
6.10.1 Overview of Potential for Reconfigured Stacked Architectures
326(1)
6.10.2 3D TSV-based 3D SRAM for High-Performance Platforms
326(3)
6.10.3 Waveform Capture with 100 GB/s I/O, 4096 TSVs and an Active Si Interposer
329(1)
6.10.4 3D Stacked FPGA and ReRAM Configuration Memory
330(1)
6.10.5 Cache Architecture to Configure Stacked DRAM to Specific Applications
330(1)
6.10.6 Network Platform for Stacked Memory—Processor Architectures
331(1)
6.10.7 Multiplexing Signals to Reduce Number of TSVs in IC Die Stacking
332(1)
6.10.8 3D Hybrid Cache with MRAM and SRAM Stacked on Processor Cores
333(1)
6.10.9 CMOS FPGA and Routing Switches Made with ReRAM Devices
333(1)
6.10.10 Dynamic Configurable SRAM Stacked with Various Logic Chips
333(1)
6.11 Stacking Memories Using Noncontact Connections with Inductive Coupling
333(7)
6.11.1 Overview of Noncontact Inductive Coupling of Stacked Memory
333(1)
6.11.2 Early Concepts of Inductive-Coupling Connections of Stacked Memory Chips
334(2)
6.11.3 Evolution of Inductive-Coupling Connections of NAND Flash Stacks
336(2)
6.11.4 TCI for Replacing Stacking with TSV Connections
338(1)
6.11.5 Processor—SRAM 3D Integration Using Inductive Coupling
339(1)
6.11.6 Optical Interface for Future 3D Stacked Chip Connections
339(1)
References
340(5)
Index 345
Dr Betty Prince has over 30 years experience in the semiconductor industry having worked with Texas Instruments, N.V. Philips, Motorola, R.C.A., and Fairchild and is currently CEO of Memory Strategies International. She has authored four books and served from 1991-1994 on the Technical Advisory Board of IEEE Spectrum magazine. She is a Senior Life Member of the IEEE and served as an IEEE SSCS Distinguished Lecturer and on the Program Committee of the IEEE Custom Integrated Circuit conference. She was founder of the JEDEC JC-16 Interface Standards Committee and was active for many years on the JC-42 Memory Committee where she was co-chair of the SRAM standards group. She has been U.S. representative to the IEC SC47A WG3 Memory Standards Committee. Dr Prince has served on the Technical Advisory Board of several memory companies and has been on the Board of Directors of Mosaid Technologies. She holds patents in the memory, processor and interface areas and has degrees in Physics, Math, and Finance with doctoral dissertation in fractal modeling.