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1 | (10) |
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1.1 Wire Bonding Technologies |
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1 | (1) |
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1.2 Ball Bonding vs. Wedge Bonding |
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2 | (1) |
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1.3 From Gold to Cu Wire Bonding |
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3 | (5) |
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8 | (1) |
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9 | (2) |
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11 | (28) |
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11 | (4) |
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2.2 Oxidation Prevention Technology |
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15 | (1) |
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2.3 Free Air Ball Formation |
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15 | (2) |
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2.4 First (Ball) and Second (Wedge) Bond |
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17 | (1) |
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2.5 Wire Bond Process Parameters |
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18 | (9) |
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18 | (3) |
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2.5.2 Electric Flame-Off Current and Firing Time |
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21 | (4) |
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25 | (1) |
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2.5.4 Bonding Temperature and Time |
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26 | (1) |
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2.6 Bonding Process Optimization |
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27 | (3) |
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30 | (7) |
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37 | (2) |
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39 | (18) |
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3.1 Bare Copper (Cu) and Palladium-Coated Cu Wire |
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39 | (1) |
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3.2 Bare Cu Wire on Al Pads |
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40 | (4) |
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3.3 Bare Cu Wire on Au- and Ni-Based Die Bond Pads |
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44 | (1) |
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45 | (1) |
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3.5 Bond-Pad Interfacial Metallurgies |
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46 | (9) |
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3.5.1 Au-Al and Cu-Al Intermetallics |
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46 | (8) |
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3.5.2 Cu-Au and Cu-Al Intermetallics |
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54 | (1) |
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3.5.3 Au-AuNi, Au-AuPdNi, Cu-AuNi, and Cu-AlPdNi |
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55 | (1) |
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55 | (2) |
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57 | (16) |
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4.1 Criteria for Good Bond Formation |
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57 | (1) |
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4.2 Pre-bonding Inspection |
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58 | (1) |
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4.3 Post-bonding Inspection |
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58 | (3) |
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4.3.1 Nondestructive Test |
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59 | (1) |
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59 | (2) |
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61 | (5) |
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61 | (2) |
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63 | (3) |
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4.5 Failure Mechanism and Modes |
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66 | (1) |
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4.6 Quality Assurance and Testing Methods |
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67 | (3) |
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4.7 Wire Bond Reliability Evaluation |
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70 | (1) |
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71 | (2) |
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5 Thermal Reliability Tests |
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73 | (20) |
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5.1 High-Temperature Storage Tests |
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73 | (14) |
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74 | (2) |
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5.1.2 Bare Cu on Al, Au, and NiPdAu Pads |
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76 | (5) |
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5.1.3 Bare Cu vs. Palladium-Coated Copper Wires |
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81 | (4) |
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5.1.4 IMC Growth Model and Acceleration Factor |
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85 | (2) |
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5.2 Thermal Shock and Thermal Cycling Tests |
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87 | (4) |
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5.2.1 Bare Cu and PdCu Wires |
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89 | (1) |
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5.2.2 Failure Model and Acceleration Factor for Thermal Cycling Tests |
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90 | (1) |
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91 | (2) |
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6 Humidity and Electromigration Tests |
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93 | (18) |
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6.1 Humidity-Related Reliability Tests (PCT and HAST) |
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93 | (9) |
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94 | (3) |
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97 | (4) |
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6.1.3 Failure Model and Acceleration Factor for Humidity Tests |
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101 | (1) |
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6.2 Electromigration Tests |
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102 | (6) |
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103 | (5) |
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6.2.2 Failure Model and Acceleration Factor for Electromigration Tests |
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108 | (1) |
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108 | (3) |
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111 | (22) |
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111 | (4) |
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112 | (3) |
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115 | (1) |
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7.2 Over Pad Metallization/Pad Finishes |
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115 | (3) |
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7.3 Pad Finish/Metallization Thickness |
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118 | (1) |
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7.4 Factors Affecting Pad Bondability |
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119 | (6) |
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120 | (3) |
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7.4.2 Lead Frame Contamination |
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123 | (1) |
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7.4.3 Pad Surface Roughness |
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124 | (1) |
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7.5 Bond Pad Surface Treatments |
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125 | (6) |
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7.5.1 Organic Coatings on Pad |
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125 | (1) |
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126 | (5) |
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131 | (2) |
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133 | (18) |
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8.1 Cu Hardness: Al Splash and Pad Cratering |
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133 | (1) |
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8.2 Process-Related Concerns |
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134 | (2) |
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8.2.1 Oxidation Prevention Technology |
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135 | (1) |
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8.2.2 Capillary Mean Time Between Assist and Lifetime |
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135 | (1) |
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8.2.3 Wire Bonding for Specialized Applications |
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136 | (1) |
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8.3 Corrosion from Mold Compound and Decapsulating Chemicals |
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136 | (1) |
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137 | (2) |
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8.4.1 Second Bond and Tail Bond |
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138 | (1) |
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8.4.2 Yield and Requalification |
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138 | (1) |
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8.4.3 Lack of Standardized Test Methods and Reliability Data |
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139 | (1) |
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8.4.4 Lack of Widespread Cu Wire Bonding Capability |
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139 | (1) |
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139 | (9) |
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8.5.1 Bonding Process Optimization |
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139 | (2) |
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8.5.2 Oxidation Prevention Technology |
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141 | (1) |
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8.5.3 Pad Cratering, Al Splash, and Surface Contamination |
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142 | (3) |
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8.5.4 Mold Compound and Deprocessing Scheme |
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145 | (2) |
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147 | (1) |
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148 | (3) |
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151 | (8) |
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9.1 Copper Wire Bonding Process |
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151 | (2) |
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9.2 Palladium-Coated Copper Wires |
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153 | (1) |
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154 | (1) |
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155 | (1) |
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9.5 Strength and Reliability Evaluation |
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156 | (3) |
Appendix A Reliability Data |
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159 | (8) |
Appendix B Patents on Copper Wire Bonding |
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167 | (44) |
References |
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211 | (16) |
Index |
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227 | |