"Dr. Sarangan has done an excellent job of providing a practical text for scientists and technologists interested in the principles of nanofabrication. This book would serve as a relatively comprehensive reference text for anyone beginning the journey of creating solutions in the science of very small things." Greg Peake, Sandia National Laboratories, Albuquerque, New Mexico, USA
"This book is beneficial to the community of nanoscience and nanotechnology." Yongyuan Jiang, Harbin Institute of Technology, China
"Overall, the book is an excellent source for new, as well as, highly experienced engineers in the field of device fabrication. It presents easy to understand descriptions of very complicated processes and techniques. The numerical examples offer tremendous insight into what is physically being done during device fabrication. Dr. Saragan has done an excellent service to the community by authoring this text." Ronald A. Coutu, Jr., Marquette University, Milwaukee, Wisconsin, USA
