David G. Seiler, Alain C. Diebold, Thomas J. Shaffner, Robert McDonald, W. Murray Bullis, Patrick J. Smith, Erik M. Secula
Sērija : AIP Conference Proceedings
(Izdošanas datums: 01-Mar-2001, Multiple-component retail product, Izdevniecība: American Institute of Physics, ISBN-13: 9781563969676)
The June 2000 conference was held at the National Institute of Standards and Technology and brought together leaders, scientists, and engineers concerned with all aspects of technology, characterization techniques, and metrology for silicon research....Lasīt vairāk